Browsing by Author rp01604

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TitleAuthor(s)Issue Date
Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics
Proceeding/Conference:Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
2005
 
Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion
Journal:International Journal of Heat and Mass Transfer
1996
A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition
Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2004
 
1992
Wavelength routing with MEMS switch and a single AWG
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
2005