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Conference Paper: Solid-phase crystallization of evaporated silicon thin films on glass for photovoltaics: a combined SEM and TEM study
Title | Solid-phase crystallization of evaporated silicon thin films on glass for photovoltaics: a combined SEM and TEM study |
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Authors | |
Keywords | Thin-film solar cells Solid-phase crystallization Polycrystalline silicon Evaporation Glass Impurities Intragrain defects Photovoltaics |
Issue Date | 2009 |
Publisher | SPIE - International Society for Optical Engineering. The Journal's web site is located at https://www.spiedigitallibrary.org/conference-proceedings-of-spie |
Citation | SPIE Solar Energy + Technology, San Diego, CA, 2-6 August 2009. In Proceedings of SPIE, 2009, v. 7409, p. 740906 How to Cite? |
Abstract | The material-quality limiting factors of evaporated solid-phase crystallized (SPC) poly-Si thin films fabricated on planar glass for photovoltaic applications are investigated by a study combining scanning electron microscopy and transmission electron microscopy. The grains in the investigated thin films are found to be randomly oriented, with an average grain size of ∼2.1 μm. In general, the grains are found to have a high defect density, although some grains are more defective than others. We also observe a high level of impurity incorporation, in particular, oxygen, into the film. The optical activity of the Si films is dominated by deep band tail states. We conclude that the high intragrain defect densities and the high impurity levels are two major limiting factors for obtaining high-quality evaporated SPC poly-Si thin films for photovoltaics. © 2009 SPIE. |
Persistent Identifier | http://hdl.handle.net/10722/91384 |
ISBN | |
ISSN | 2023 SCImago Journal Rankings: 0.152 |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Liu, F | en_HK |
dc.contributor.author | Romero, MJ | en_HK |
dc.contributor.author | Jones, KM | en_HK |
dc.contributor.author | Al-Jassim, MM | en_HK |
dc.contributor.author | Kunz, O | en_HK |
dc.contributor.author | Wong, J | en_HK |
dc.contributor.author | Aberle, AG | en_HK |
dc.date.accessioned | 2010-09-17T10:18:24Z | - |
dc.date.available | 2010-09-17T10:18:24Z | - |
dc.date.issued | 2009 | en_HK |
dc.identifier.citation | SPIE Solar Energy + Technology, San Diego, CA, 2-6 August 2009. In Proceedings of SPIE, 2009, v. 7409, p. 740906 | en_HK |
dc.identifier.isbn | 9780819476999 | - |
dc.identifier.issn | 0277-786X | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/91384 | - |
dc.description.abstract | The material-quality limiting factors of evaporated solid-phase crystallized (SPC) poly-Si thin films fabricated on planar glass for photovoltaic applications are investigated by a study combining scanning electron microscopy and transmission electron microscopy. The grains in the investigated thin films are found to be randomly oriented, with an average grain size of ∼2.1 μm. In general, the grains are found to have a high defect density, although some grains are more defective than others. We also observe a high level of impurity incorporation, in particular, oxygen, into the film. The optical activity of the Si films is dominated by deep band tail states. We conclude that the high intragrain defect densities and the high impurity levels are two major limiting factors for obtaining high-quality evaporated SPC poly-Si thin films for photovoltaics. © 2009 SPIE. | en_HK |
dc.language | eng | en_HK |
dc.publisher | SPIE - International Society for Optical Engineering. The Journal's web site is located at https://www.spiedigitallibrary.org/conference-proceedings-of-spie | - |
dc.relation.ispartof | Proceedings of SPIE | en_HK |
dc.subject | Thin-film solar cells | en_HK |
dc.subject | Solid-phase crystallization | en_HK |
dc.subject | Polycrystalline silicon | en_HK |
dc.subject | Evaporation | en_HK |
dc.subject | Glass | en_HK |
dc.subject | Impurities | en_HK |
dc.subject | Intragrain defects | en_HK |
dc.subject | Photovoltaics | en_HK |
dc.title | Solid-phase crystallization of evaporated silicon thin films on glass for photovoltaics: a combined SEM and TEM study | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Liu, F: fordliu@hku.hk | en_HK |
dc.identifier.authority | Liu, F=rp01358 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1117/12.823622 | en_HK |
dc.identifier.scopus | eid_2-s2.0-70449642942 | en_HK |
dc.identifier.hkuros | 194602 | - |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-70449642942&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 7409 | en_HK |
dc.identifier.spage | 740906 | - |
dc.identifier.epage | 740906 | - |
dc.publisher.place | United States | en_HK |
dc.identifier.scopusauthorid | Aberle, AG=7006162095 | en_HK |
dc.identifier.scopusauthorid | Wong, J=7404431480 | en_HK |
dc.identifier.scopusauthorid | Kunz, O=23990733000 | en_HK |
dc.identifier.scopusauthorid | AlJassim, MM=7005692042 | en_HK |
dc.identifier.scopusauthorid | Jones, KM=24321208800 | en_HK |
dc.identifier.scopusauthorid | Romero, MJ=7202431518 | en_HK |
dc.identifier.scopusauthorid | Liu, F=11038795100 | en_HK |
dc.identifier.issnl | 0277-786X | - |