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Article: Fabrication and characterization of a new type 4 × 4 arrayed position sensitive detector

TitleFabrication and characterization of a new type 4 × 4 arrayed position sensitive detector
Authors
KeywordsArray
Crystal Silicon
P-N Junction
Position Sensitive
Wavefront Sensor
Issue Date2005
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/app/Publications/index.cfm?fuseaction=proceedings
Citation
Proceedings of SPIE - The International Society for Optical Engineering, 2005, v. 5644 PART 2, p. 557-562 How to Cite?
AbstractPosition sensitive detectors (PSD) use the lateral photo effect to determine the centroid position of an incident light spot focused on it. A 65-pin ceramic packaged 4×4 arrayed position sensitive detector was fabricated first time as a new prototype of Hartmann-Shack wavefront sensor. The detector, consisting of 16 tetra-lateral sensitive areas, is a p-n-n+ configuration made on 3-inch <111> n-type high resistance crystal silicon substrate. A 100nm antireflection SiO2thin film was formed on the surface and a multi-layer cover glass with transmissivity > 98% from 400nm to 950nm. The main parameters of the arrayed as wavefront detector, such as reverse voltage, dark current photosensitivity, response time were reported in the paper.
Persistent Identifierhttp://hdl.handle.net/10722/91044
ISSN
References

 

DC FieldValueLanguage
dc.contributor.authorXunjun, QIen_HK
dc.contributor.authorLin, Ben_HK
dc.contributor.authorChen, Den_HK
dc.contributor.authorChen, Yen_HK
dc.date.accessioned2010-09-17T10:12:12Z-
dc.date.available2010-09-17T10:12:12Z-
dc.date.issued2005en_HK
dc.identifier.citationProceedings of SPIE - The International Society for Optical Engineering, 2005, v. 5644 PART 2, p. 557-562en_HK
dc.identifier.issn0277-786Xen_HK
dc.identifier.urihttp://hdl.handle.net/10722/91044-
dc.description.abstractPosition sensitive detectors (PSD) use the lateral photo effect to determine the centroid position of an incident light spot focused on it. A 65-pin ceramic packaged 4×4 arrayed position sensitive detector was fabricated first time as a new prototype of Hartmann-Shack wavefront sensor. The detector, consisting of 16 tetra-lateral sensitive areas, is a p-n-n+ configuration made on 3-inch <111> n-type high resistance crystal silicon substrate. A 100nm antireflection SiO2thin film was formed on the surface and a multi-layer cover glass with transmissivity > 98% from 400nm to 950nm. The main parameters of the arrayed as wavefront detector, such as reverse voltage, dark current photosensitivity, response time were reported in the paper.en_HK
dc.languageengen_HK
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/app/Publications/index.cfm?fuseaction=proceedingsen_HK
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_HK
dc.subjectArrayen_HK
dc.subjectCrystal Siliconen_HK
dc.subjectP-N Junctionen_HK
dc.subjectPosition Sensitiveen_HK
dc.subjectWavefront Sensoren_HK
dc.titleFabrication and characterization of a new type 4 × 4 arrayed position sensitive detectoren_HK
dc.typeArticleen_HK
dc.identifier.emailLin, B:blin@hku.hken_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1117/12.568243en_HK
dc.identifier.scopuseid_2-s2.0-20044367132en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-20044367132&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume5644en_HK
dc.identifier.issuePART 2en_HK
dc.identifier.spage557en_HK
dc.identifier.epage562en_HK

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