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Article: Measurement of grating thickness with power spectrum

TitleMeasurement of grating thickness with power spectrum
Authors
Li, H-LWen, X-JCao, X-QLin, B
KeywordsDiffraction Frequency Spectrum
Fourier Optics
Phase Gratings
Thin Film Thickness Measurement
Issue Date2004
Citation
Guangdian Gongcheng/Opto-Electronic Engineering, 2004, v. 31 n. 5, p. 46-48 How to Cite?
AbstractA lot of grating messages including the profile can be derived from diffraction spectrum of grating according to Fourier optical theory. A function relation between zero, first-order diffracted light intensity and film thickness of grating with rectangular phase is derived by using Fourier transform of grating with rectangular phase. From this point, the film thickness of grating can be calculated after zero and first order light intensity is measured. With step tester as reference, the measuring error of this method is within 4%.
Persistent Identifierhttp://hdl.handle.net/10722/90806
ISSN
1003-501X
2020 SCImago Journal Rankings: 0.257

 

DC FieldValueLanguage
dc.contributor.authorLi, H-Len_HK
dc.contributor.authorWen, X-Jen_HK
dc.contributor.authorCao, X-Qen_HK
dc.contributor.authorLin, Ben_HK
dc.date.accessioned2010-09-17T10:08:40Z-
dc.date.available2010-09-17T10:08:40Z-
dc.date.issued2004en_HK
dc.identifier.citationGuangdian Gongcheng/Opto-Electronic Engineering, 2004, v. 31 n. 5, p. 46-48en_HK
dc.identifier.issn1003-501Xen_HK
dc.identifier.urihttp://hdl.handle.net/10722/90806-
dc.description.abstractA lot of grating messages including the profile can be derived from diffraction spectrum of grating according to Fourier optical theory. A function relation between zero, first-order diffracted light intensity and film thickness of grating with rectangular phase is derived by using Fourier transform of grating with rectangular phase. From this point, the film thickness of grating can be calculated after zero and first order light intensity is measured. With step tester as reference, the measuring error of this method is within 4%.en_HK
dc.languageengen_HK
dc.relation.ispartofGuangdian Gongcheng/Opto-Electronic Engineeringen_HK
dc.subjectDiffraction Frequency Spectrumen_HK
dc.subjectFourier Opticsen_HK
dc.subjectPhase Gratingsen_HK
dc.subjectThin Film Thickness Measurementen_HK
dc.titleMeasurement of grating thickness with power spectrumen_HK
dc.typeArticleen_HK
dc.identifier.emailLin, B:blin@hku.hken_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-3943065701en_HK
dc.identifier.volume31en_HK
dc.identifier.issue5en_HK
dc.identifier.spage46en_HK
dc.identifier.epage48en_HK
dc.identifier.issnl1003-501X-

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