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Article: A new subdivision technique for grating based on CMOS microscopic imaging

TitleA new subdivision technique for grating based on CMOS microscopic imaging
Authors
KeywordsDiffraction Gratings
Image Processing
Optical Systems
Issue Date2007
PublisherChinese Optical Society. The Journal's web site is located at http://zgjg-e.periodicals.net.cn/default.html
Citation
Chinese Optics Letters, 2007, v. 5 n. 5, p. 278-280 How to Cite?
AbstractWe propose a new subdivision technique directly subdividing the grating stripe by using complementary metal-oxide semiconductor (CMOS) microscopic imaging system combined with image processing. The corresponding optical system, subdivision principle, and image processing methods are illuminated. The relations of systemic resolution to subdivision number, grating period, magnifying power and tilt angle are theoretically discussed and experimentally checked on the Abbe comparator. The measurement precision for displacement of the proposed subdivision system is tested in the range of 5 mm and the maximum displacement error is less than 0.4 μm. The factors contributing to the systemic error are also discussed.
Persistent Identifierhttp://hdl.handle.net/10722/90787
ISSN
2015 Impact Factor: 1.899
2015 SCImago Journal Rankings: 0.409
References

 

DC FieldValueLanguage
dc.contributor.authorYuan, Ben_HK
dc.contributor.authorYan, Hen_HK
dc.contributor.authorCao, Xen_HK
dc.contributor.authorLin, Ben_HK
dc.date.accessioned2010-09-17T10:08:23Z-
dc.date.available2010-09-17T10:08:23Z-
dc.date.issued2007en_HK
dc.identifier.citationChinese Optics Letters, 2007, v. 5 n. 5, p. 278-280en_HK
dc.identifier.issn1671-7694en_HK
dc.identifier.urihttp://hdl.handle.net/10722/90787-
dc.description.abstractWe propose a new subdivision technique directly subdividing the grating stripe by using complementary metal-oxide semiconductor (CMOS) microscopic imaging system combined with image processing. The corresponding optical system, subdivision principle, and image processing methods are illuminated. The relations of systemic resolution to subdivision number, grating period, magnifying power and tilt angle are theoretically discussed and experimentally checked on the Abbe comparator. The measurement precision for displacement of the proposed subdivision system is tested in the range of 5 mm and the maximum displacement error is less than 0.4 μm. The factors contributing to the systemic error are also discussed.en_HK
dc.languageengen_HK
dc.publisherChinese Optical Society. The Journal's web site is located at http://zgjg-e.periodicals.net.cn/default.htmlen_HK
dc.relation.ispartofChinese Optics Lettersen_HK
dc.subjectDiffraction Gratingsen_HK
dc.subjectImage Processingen_HK
dc.subjectOptical Systemsen_HK
dc.titleA new subdivision technique for grating based on CMOS microscopic imagingen_HK
dc.typeArticleen_HK
dc.identifier.emailLin, B:blin@hku.hken_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-34250339308en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-34250339308&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume5en_HK
dc.identifier.issue5en_HK
dc.identifier.spage278en_HK
dc.identifier.epage280en_HK

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