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Article: Application of silica ceramic in precision stage

TitleApplication of silica ceramic in precision stage
Authors
KeywordsFinite Element Method
Linear Motor
Precision Stage
Silica Ceramic
Thermal Analysis
Issue Date2005
PublisherZhongguo Kexueyuan, Changchun Guangxue Jingmei Jijie Yanjiusuo. The Journal's web site is located at http://gxjmgc.periodicals.com.cn/default.html
Citation
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2005, v. 13 n. 1, p. 73-80 How to Cite?
AbstractThe temperature rise, deformation, deformation via room temperature change and the time of reaching heat balance of the motion table in precision linear motor driven stage made of steel, aluminum, alumina ceramic and silica ceramic are analyzed. The results show that the temperature rise of silica ceramic with small heat conductivity coefficient decreases clearly. Because of the small thermal expansion coefficient, the deformation of silica ceramic table is small. The thermal stress and deformation of silica ceramic table due to room temperature change are smaller than those of aluminum, steel and alumina ceramic tables. The heat conduction of silica ceramic is slow, so the time of reaching heat balance is long. As a result of the motion table being badly influenced by the primary section of the linear motor in precision linear motor stage, precision stage should choose the material with small heat conductivity coefficient, small thermal expansion coefficient and insensitive to temperature change. Silica ceramic is the suitable ceramic material for these stages.
Persistent Identifierhttp://hdl.handle.net/10722/90768
ISSN
2015 SCImago Journal Rankings: 0.606
References

 

DC FieldValueLanguage
dc.contributor.authorLin, Ben_HK
dc.contributor.authorZhang, X-Fen_HK
dc.contributor.authorZhang, G-Len_HK
dc.date.accessioned2010-09-17T10:08:05Z-
dc.date.available2010-09-17T10:08:05Z-
dc.date.issued2005en_HK
dc.identifier.citationGuangxue Jingmi Gongcheng/Optics and Precision Engineering, 2005, v. 13 n. 1, p. 73-80en_HK
dc.identifier.issn1004-924Xen_HK
dc.identifier.urihttp://hdl.handle.net/10722/90768-
dc.description.abstractThe temperature rise, deformation, deformation via room temperature change and the time of reaching heat balance of the motion table in precision linear motor driven stage made of steel, aluminum, alumina ceramic and silica ceramic are analyzed. The results show that the temperature rise of silica ceramic with small heat conductivity coefficient decreases clearly. Because of the small thermal expansion coefficient, the deformation of silica ceramic table is small. The thermal stress and deformation of silica ceramic table due to room temperature change are smaller than those of aluminum, steel and alumina ceramic tables. The heat conduction of silica ceramic is slow, so the time of reaching heat balance is long. As a result of the motion table being badly influenced by the primary section of the linear motor in precision linear motor stage, precision stage should choose the material with small heat conductivity coefficient, small thermal expansion coefficient and insensitive to temperature change. Silica ceramic is the suitable ceramic material for these stages.en_HK
dc.languageengen_HK
dc.publisherZhongguo Kexueyuan, Changchun Guangxue Jingmei Jijie Yanjiusuo. The Journal's web site is located at http://gxjmgc.periodicals.com.cn/default.htmlen_HK
dc.relation.ispartofGuangxue Jingmi Gongcheng/Optics and Precision Engineeringen_HK
dc.subjectFinite Element Methoden_HK
dc.subjectLinear Motoren_HK
dc.subjectPrecision Stageen_HK
dc.subjectSilica Ceramicen_HK
dc.subjectThermal Analysisen_HK
dc.titleApplication of silica ceramic in precision stageen_HK
dc.typeArticleen_HK
dc.identifier.emailLin, B:blin@hku.hken_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-15944382735en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-15944382735&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume13en_HK
dc.identifier.issue1en_HK
dc.identifier.spage73en_HK
dc.identifier.epage80en_HK

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