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- Publisher Website: 10.1088/0957-4484/16/8/022
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Article: Random capacitance modulation due to charging/discharging in Si nanocrystals embedded in gate dielectric
Title | Random capacitance modulation due to charging/discharging in Si nanocrystals embedded in gate dielectric |
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Authors | |
Issue Date | 2005 |
Publisher | Institute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/nano |
Citation | Nanotechnology, 2005, v. 16 n. 8, p. 1119-1122 How to Cite? |
Abstract | In this paper, we report a study on time-domain capacitance characterization of metal-oxide-semiconductor (MOS) structures with Si nanocrystals (nc-Si) distributing throughout the gate oxide. A drastic reduction of MOS capacitance can be observed by charge trapping in nc-Si, while release of the charges leads to the recovery of the capacitance. Such capacitance modulation is explained by an equivalent circuit in terms of the change of nc-Si capacitance as a result of charging/discharging. As the capacitance modulation represents a change in the electrical states of MOS structure, it could be used for memory applications. © 2005 IOP Publishing Ltd. |
Persistent Identifier | http://hdl.handle.net/10722/80907 |
ISSN | 2023 Impact Factor: 2.9 2023 SCImago Journal Rankings: 0.631 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
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dc.contributor.author | Liu, Y | en_HK |
dc.contributor.author | Chen, TP | en_HK |
dc.contributor.author | Ng, CY | en_HK |
dc.contributor.author | Tse, MS | en_HK |
dc.contributor.author | Zhao, P | en_HK |
dc.contributor.author | Fu, YQ | en_HK |
dc.contributor.author | Zhang, S | en_HK |
dc.contributor.author | Fung, S | en_HK |
dc.date.accessioned | 2010-09-06T08:11:35Z | - |
dc.date.available | 2010-09-06T08:11:35Z | - |
dc.date.issued | 2005 | en_HK |
dc.identifier.citation | Nanotechnology, 2005, v. 16 n. 8, p. 1119-1122 | en_HK |
dc.identifier.issn | 0957-4484 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/80907 | - |
dc.description.abstract | In this paper, we report a study on time-domain capacitance characterization of metal-oxide-semiconductor (MOS) structures with Si nanocrystals (nc-Si) distributing throughout the gate oxide. A drastic reduction of MOS capacitance can be observed by charge trapping in nc-Si, while release of the charges leads to the recovery of the capacitance. Such capacitance modulation is explained by an equivalent circuit in terms of the change of nc-Si capacitance as a result of charging/discharging. As the capacitance modulation represents a change in the electrical states of MOS structure, it could be used for memory applications. © 2005 IOP Publishing Ltd. | en_HK |
dc.language | eng | en_HK |
dc.publisher | Institute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/nano | en_HK |
dc.relation.ispartof | Nanotechnology | en_HK |
dc.title | Random capacitance modulation due to charging/discharging in Si nanocrystals embedded in gate dielectric | en_HK |
dc.type | Article | en_HK |
dc.identifier.openurl | http://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0957-4484&volume=16&spage=1119&epage=1122&date=2005&atitle=Random+capacitance+modulation+due+to+charging/discharging+in+Si+nanocrystals+embedded+in+gate+dielectric | en_HK |
dc.identifier.email | Fung, S: sfung@hku.hk | en_HK |
dc.identifier.authority | Fung, S=rp00695 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1088/0957-4484/16/8/022 | en_HK |
dc.identifier.scopus | eid_2-s2.0-21144456454 | en_HK |
dc.identifier.hkuros | 98130 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-21144456454&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 16 | en_HK |
dc.identifier.issue | 8 | en_HK |
dc.identifier.spage | 1119 | en_HK |
dc.identifier.epage | 1122 | en_HK |
dc.identifier.isi | WOS:000231410600022 | - |
dc.publisher.place | United Kingdom | en_HK |
dc.identifier.scopusauthorid | Liu, Y=36064444100 | en_HK |
dc.identifier.scopusauthorid | Chen, TP=7405540443 | en_HK |
dc.identifier.scopusauthorid | Ng, CY=8604409400 | en_HK |
dc.identifier.scopusauthorid | Tse, MS=7103352646 | en_HK |
dc.identifier.scopusauthorid | Zhao, P=8521897200 | en_HK |
dc.identifier.scopusauthorid | Fu, YQ=7404433406 | en_HK |
dc.identifier.scopusauthorid | Zhang, S=7409376020 | en_HK |
dc.identifier.scopusauthorid | Fung, S=7201970040 | en_HK |
dc.identifier.citeulike | 207024 | - |
dc.identifier.issnl | 0957-4484 | - |