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Article: Hydrogenated nanocrystalline silicon carbide films synthesized by ECR-CVD and its intense visible photoluminescence at room temperature

TitleHydrogenated nanocrystalline silicon carbide films synthesized by ECR-CVD and its intense visible photoluminescence at room temperature
Authors
Issue Date2000
PublisherElsevier S.A.. The Journal's web site is located at http://www.elsevier.com/locate/tsf
Citation
Thin Solid Films, 2000, v. 377-378, p. 177-181 How to Cite?
AbstractHydrogenated nanocrystalline silicon carbide (nc-SiC:H) films, which contain nanosize SiC crystals embedded in a-SiC:H matrix were fabricated by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) technique. It was found that under the deposition conditions of strong hydrogen dilutions and high microwave power, films containing SiC nanocrystallites embedded in an SiC:H amorphous matrix could be obtained, as shown by the use of high resolution transmission electron microscopy. Infrared absorption, Raman scattering and X-ray photoelectron spectroscopy studies have also confirmed the successful fabrication of these nc-SiC:H films. Very strong photoluminescence in the visible range with a peak energy of 2.64 eV could be observed from these films at room temperature. Temporal evolution of the PL at the peak emission energy exhibits a bi-exponential decay process with lifetimes that are in the order of ps and ns. The strong light emission and short PL lifetimes observed strongly suggest that the radiative recombination is a result of direct optical transitions in the SiC nanocrystallites. The results obtained in this study show that these nc-SiC:H films are potentially suitable as active layers in large area flat panel displays.
Persistent Identifierhttp://hdl.handle.net/10722/80830
ISSN
2015 Impact Factor: 1.761
2015 SCImago Journal Rankings: 0.726
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorYu, MBen_HK
dc.contributor.authorRuslien_HK
dc.contributor.authorYoon, SFen_HK
dc.contributor.authorXu, SJen_HK
dc.contributor.authorChew, Ken_HK
dc.contributor.authorCui, Jen_HK
dc.contributor.authorAhn, Jen_HK
dc.contributor.authorZhang, Qen_HK
dc.date.accessioned2010-09-06T08:10:45Z-
dc.date.available2010-09-06T08:10:45Z-
dc.date.issued2000en_HK
dc.identifier.citationThin Solid Films, 2000, v. 377-378, p. 177-181en_HK
dc.identifier.issn0040-6090en_HK
dc.identifier.urihttp://hdl.handle.net/10722/80830-
dc.description.abstractHydrogenated nanocrystalline silicon carbide (nc-SiC:H) films, which contain nanosize SiC crystals embedded in a-SiC:H matrix were fabricated by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) technique. It was found that under the deposition conditions of strong hydrogen dilutions and high microwave power, films containing SiC nanocrystallites embedded in an SiC:H amorphous matrix could be obtained, as shown by the use of high resolution transmission electron microscopy. Infrared absorption, Raman scattering and X-ray photoelectron spectroscopy studies have also confirmed the successful fabrication of these nc-SiC:H films. Very strong photoluminescence in the visible range with a peak energy of 2.64 eV could be observed from these films at room temperature. Temporal evolution of the PL at the peak emission energy exhibits a bi-exponential decay process with lifetimes that are in the order of ps and ns. The strong light emission and short PL lifetimes observed strongly suggest that the radiative recombination is a result of direct optical transitions in the SiC nanocrystallites. The results obtained in this study show that these nc-SiC:H films are potentially suitable as active layers in large area flat panel displays.en_HK
dc.languageengen_HK
dc.publisherElsevier S.A.. The Journal's web site is located at http://www.elsevier.com/locate/tsfen_HK
dc.relation.ispartofThin Solid Filmsen_HK
dc.titleHydrogenated nanocrystalline silicon carbide films synthesized by ECR-CVD and its intense visible photoluminescence at room temperatureen_HK
dc.typeArticleen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0040-6090&volume=377-378&spage=177&epage=181&date=2000&atitle=Hydrogenated+Nanocrystalline+Silicon+Carbide+Films+Synthesized+by+ECR-CVD+And+Its+Intense+Visible+Photoluminescence+at+Room+Temperatureen_HK
dc.identifier.emailXu, SJ: sjxu@hku.hken_HK
dc.identifier.authorityXu, SJ=rp00821en_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1016/S0040-6090(00)01426-7en_HK
dc.identifier.scopuseid_2-s2.0-0034515076en_HK
dc.identifier.hkuros65104en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0034515076&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume377-378en_HK
dc.identifier.spage177en_HK
dc.identifier.epage181en_HK
dc.identifier.isiWOS:000166024600030-
dc.publisher.placeSwitzerlanden_HK
dc.identifier.scopusauthoridYu, MB=8088400600en_HK
dc.identifier.scopusauthoridRusli=7409925063en_HK
dc.identifier.scopusauthoridYoon, SF=35563567700en_HK
dc.identifier.scopusauthoridXu, SJ=7404439005en_HK
dc.identifier.scopusauthoridChew, K=7102902559en_HK
dc.identifier.scopusauthoridCui, J=7401811493en_HK
dc.identifier.scopusauthoridAhn, J=7403019265en_HK
dc.identifier.scopusauthoridZhang, Q=35294175000en_HK

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