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Article: Properties of ITO thin films deposited on amorphous and crystalline substrates with e-beam evaporation

TitleProperties of ITO thin films deposited on amorphous and crystalline substrates with e-beam evaporation
Authors
Wang, RXBeling, CDDjurišić, ABLi, SFung, S
Issue Date2004
PublisherInstitute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/sst
Citation
Semiconductor Science And Technology, 2004, v. 19 n. 6, p. 695-698 How to Cite?
DOI: http://dx.doi.org/10.1088/0268-1242/19/6/006
AbstractIndium tin oxide (ITO) thin films were deposited using the e-beam evaporation method on amorphous and crystalline substrates under identical conditions. The properties of the films were investigated using optical transmittance, XRD and XPS techniques. It was found that the properties of the films depend strongly on the nature of the substrate surface. Analysis suggests that changes in chemical composition and microstructure of the ITO films deposited on crystalline and amorphous substrates are responsible for the differences in optical properties.
Persistent Identifierhttp://hdl.handle.net/10722/80388
ISSN
0268-1242
2023 Impact Factor: 1.9
2023 SCImago Journal Rankings: 0.411
ISI Accession Number ID
WOS:000222252100008
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorWang, RXen_HK
dc.contributor.authorBeling, CDen_HK
dc.contributor.authorDjurišić, ABen_HK
dc.contributor.authorLi, Sen_HK
dc.contributor.authorFung, Sen_HK
dc.date.accessioned2010-09-06T08:05:54Z-
dc.date.available2010-09-06T08:05:54Z-
dc.date.issued2004en_HK
dc.identifier.citationSemiconductor Science And Technology, 2004, v. 19 n. 6, p. 695-698en_HK
dc.identifier.issn0268-1242en_HK
dc.identifier.urihttp://hdl.handle.net/10722/80388-
dc.description.abstractIndium tin oxide (ITO) thin films were deposited using the e-beam evaporation method on amorphous and crystalline substrates under identical conditions. The properties of the films were investigated using optical transmittance, XRD and XPS techniques. It was found that the properties of the films depend strongly on the nature of the substrate surface. Analysis suggests that changes in chemical composition and microstructure of the ITO films deposited on crystalline and amorphous substrates are responsible for the differences in optical properties.en_HK
dc.languageengen_HK
dc.publisherInstitute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/ssten_HK
dc.relation.ispartofSemiconductor Science and Technologyen_HK
dc.titleProperties of ITO thin films deposited on amorphous and crystalline substrates with e-beam evaporationen_HK
dc.typeArticleen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0268-1242&volume=19&spage=695&epage=698&date=2004&atitle=Properties+of+ITO+thin+films+deposited+on+amorphous+and+crystalline+substrates+with+e-beam+evaporationen_HK
dc.identifier.emailBeling, CD: cdbeling@hkucc.hku.hken_HK
dc.identifier.emailDjurišić, AB: dalek@hku.hken_HK
dc.identifier.emailFung, S: sfung@hku.hken_HK
dc.identifier.authorityBeling, CD=rp00660en_HK
dc.identifier.authorityDjurišić, AB=rp00690en_HK
dc.identifier.authorityFung, S=rp00695en_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1088/0268-1242/19/6/006en_HK
dc.identifier.scopuseid_2-s2.0-2942595867en_HK
dc.identifier.hkuros88906en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-2942595867&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume19en_HK
dc.identifier.issue6en_HK
dc.identifier.spage695en_HK
dc.identifier.epage698en_HK
dc.identifier.isiWOS:000222252100008-
dc.publisher.placeUnited Kingdomen_HK
dc.identifier.scopusauthoridWang, RX=22136651200en_HK
dc.identifier.scopusauthoridBeling, CD=7005864180en_HK
dc.identifier.scopusauthoridDjurišić, AB=7004904830en_HK
dc.identifier.scopusauthoridLi, S=7409241368en_HK
dc.identifier.scopusauthoridFung, S=7201970040en_HK
dc.identifier.issnl0268-1242-

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