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Article: A real-time S-parameter imaging system

TitleA real-time S-parameter imaging system
Authors
Issue Date2005
PublisherPolska Akademia Nauk, Instytut Fizyki. The Journal's web site is located at http://info.ifpan.edu.pl/ACTA/acta.home.html
Citation
Acta Physica Polonica A, 2005, v. 107 n. 5, p. 761-768 How to Cite?
AbstractObtaining a lateral S-parameter image scan from positrons implanted into semiconductor devices can be a helpful research tool both for localizing device structures and in diagnozing defect patterns that could help interpret function. S-parameter images can be obtained by electromagnetically rastering a variable energy positron beam of small spot size across the sample. Here we describe a general hardware and software architecture of relatively low cost that has recently been developed in our laboratory which allows the whole sub-surface S-parameter image of a sample or device to be obtained in real time. This system has the advantage over more conventional sequential scanning techniques of allowing the operator to terminate data collection once the quality of the image is deemed sufficient. As an example of the usefulness of this type of imaging architecture, S-parameter images of a representative sample are presented at two different positron implantation energies.
Persistent Identifierhttp://hdl.handle.net/10722/80365
ISSN
2015 Impact Factor: 0.525
2015 SCImago Journal Rankings: 0.273
References

 

DC FieldValueLanguage
dc.contributor.authorNaik, PSen_HK
dc.contributor.authorCheung, CKen_HK
dc.contributor.authorBeling, CDen_HK
dc.contributor.authorFung, Sen_HK
dc.date.accessioned2010-09-06T08:05:39Z-
dc.date.available2010-09-06T08:05:39Z-
dc.date.issued2005en_HK
dc.identifier.citationActa Physica Polonica A, 2005, v. 107 n. 5, p. 761-768en_HK
dc.identifier.issn0587-4246en_HK
dc.identifier.urihttp://hdl.handle.net/10722/80365-
dc.description.abstractObtaining a lateral S-parameter image scan from positrons implanted into semiconductor devices can be a helpful research tool both for localizing device structures and in diagnozing defect patterns that could help interpret function. S-parameter images can be obtained by electromagnetically rastering a variable energy positron beam of small spot size across the sample. Here we describe a general hardware and software architecture of relatively low cost that has recently been developed in our laboratory which allows the whole sub-surface S-parameter image of a sample or device to be obtained in real time. This system has the advantage over more conventional sequential scanning techniques of allowing the operator to terminate data collection once the quality of the image is deemed sufficient. As an example of the usefulness of this type of imaging architecture, S-parameter images of a representative sample are presented at two different positron implantation energies.en_HK
dc.languageengen_HK
dc.publisherPolska Akademia Nauk, Instytut Fizyki. The Journal's web site is located at http://info.ifpan.edu.pl/ACTA/acta.home.htmlen_HK
dc.relation.ispartofActa Physica Polonica Aen_HK
dc.titleA real-time S-parameter imaging systemen_HK
dc.typeArticleen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=1936-0851&volume=107&spage=761&epage=768&date=2005&atitle=A+real-time+S-parameter+imaging+systemen_HK
dc.identifier.emailBeling, CD: cdbeling@hkucc.hku.hken_HK
dc.identifier.emailFung, S: sfung@hku.hken_HK
dc.identifier.authorityBeling, CD=rp00660en_HK
dc.identifier.authorityFung, S=rp00695en_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-20444426835en_HK
dc.identifier.hkuros98248en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-20444426835&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume107en_HK
dc.identifier.issue5en_HK
dc.identifier.spage761en_HK
dc.identifier.epage768en_HK
dc.publisher.placePolanden_HK
dc.identifier.scopusauthoridNaik, PS=8451851900en_HK
dc.identifier.scopusauthoridCheung, CK=10044144900en_HK
dc.identifier.scopusauthoridBeling, CD=7005864180en_HK
dc.identifier.scopusauthoridFung, S=7201970040en_HK

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