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Article: Adhension and Its Influence on Micro-Hardness of DLC and SiC Films

TitleAdhension and Its Influence on Micro-Hardness of DLC and SiC Films
Authors
KeywordsTribology and hardness
Mechanical and acoustical properties; adhesion
Laser deposition
Issue Date1999
PublisherSpringer. The Journal's web site is located at http://epjb.edpsciences.org
Citation
European Physical Journal B. Condensed Matter and Complex Systems, 1999, v. 8 n. 4, p. 493-496 How to Cite?
AbstractMicro-hardness and scratch adhesion testing are the most commonly used techniques for assessing the mechanical properties of thin films. Both of these testing methods utilize single-point contact and induce plastic deformation in the substrate and film. However, the influence of adhesion on the measured hardness has been seldom reported so far. In our experiments, diamond-like carbon (DLC) and silicon carbide (SiC) films deposited on silicon and nickel-based alloy substrates by pulsed laser ablation were indented and scratched by a Vickers micro-hardness tester and a diamond-cutter, respectively. It was found that the composite hardness decreased more rapidly for poor adhesion when increasing the indentation load. The result was explained by the elastic-plastic deformation mode of indentation and helped us to understand the physical meaning of one parameter commonly introduced in the models used to separate film hardness from the composite hardness.
Persistent Identifierhttp://hdl.handle.net/10722/80363
ISSN
2015 Impact Factor: 1.223
2015 SCImago Journal Rankings: 0.524

 

DC FieldValueLanguage
dc.contributor.authorHou, QR-
dc.contributor.authorGao, J-
dc.contributor.authorLi, SJ-
dc.date.accessioned2010-09-06T08:05:37Z-
dc.date.available2010-09-06T08:05:37Z-
dc.date.issued1999-
dc.identifier.citationEuropean Physical Journal B. Condensed Matter and Complex Systems, 1999, v. 8 n. 4, p. 493-496-
dc.identifier.issn1434-6028-
dc.identifier.urihttp://hdl.handle.net/10722/80363-
dc.description.abstractMicro-hardness and scratch adhesion testing are the most commonly used techniques for assessing the mechanical properties of thin films. Both of these testing methods utilize single-point contact and induce plastic deformation in the substrate and film. However, the influence of adhesion on the measured hardness has been seldom reported so far. In our experiments, diamond-like carbon (DLC) and silicon carbide (SiC) films deposited on silicon and nickel-based alloy substrates by pulsed laser ablation were indented and scratched by a Vickers micro-hardness tester and a diamond-cutter, respectively. It was found that the composite hardness decreased more rapidly for poor adhesion when increasing the indentation load. The result was explained by the elastic-plastic deformation mode of indentation and helped us to understand the physical meaning of one parameter commonly introduced in the models used to separate film hardness from the composite hardness.-
dc.languageeng-
dc.publisherSpringer. The Journal's web site is located at http://epjb.edpsciences.org-
dc.relation.ispartofEuropean Physical Journal B. Condensed Matter and Complex Systems-
dc.rightsThe final publication is available at Springer via http://dx.doi.org/[insert DOI]-
dc.subjectTribology and hardness-
dc.subjectMechanical and acoustical properties; adhesion-
dc.subjectLaser deposition-
dc.titleAdhension and Its Influence on Micro-Hardness of DLC and SiC Films-
dc.typeArticle-
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=1434-6028&volume=8&spage=493&epage=496&date=1999&atitle=Adhension+and+Its+Influence+on+Micro-Hardness+of+DLC+and+SiC+Filmsen_HK
dc.identifier.emailGao, J: jugao@hku.hk-
dc.identifier.authorityGao, J=rp00699-
dc.identifier.doi10.1007/s100510050716-
dc.identifier.hkuros41288-
dc.identifier.volume8-
dc.identifier.issue4-
dc.identifier.spage493-
dc.identifier.epage496-
dc.publisher.placeGermany-

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