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Article: Monolithic integrated spreading-resistance silicon flow sensor

TitleMonolithic integrated spreading-resistance silicon flow sensor
Authors
KeywordsFlow sensors
Monolithic integration
Silicon
Spreading-resistance
Temperature-sensing elements
Issue Date1997
PublisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/sna
Citation
Sensors And Actuators, A: Physical, 1997, v. 58 n. 1, p. 85-88 How to Cite?
AbstractA simple integrated flow sensor, with silicon spreading-resistance (SR) as the temperature-sensing element, has been designed and fabricated by a standard IC process. The operation of this spreading-resistance silicon flow (SRSF) sensor is based on the transfer of heat from a heated chip to a flowing fluid. The temperature difference on the chip is a measure of the flow velocity. Measurements are given for velocities up to about 4 m s-1 for air at room temperature, and higher sensor output is obtained for a higher temperature difference between the chip and flow. The SRSF sensor shows good prospects in applications involving velocity and direction sensitivities, and has great potential for flows of temperature higher than the intrinsic temperature of silicon ( ≈ 150°C) because the SR can sense higher temperature than conventional device structures.
Persistent Identifierhttp://hdl.handle.net/10722/73722
ISSN
2015 Impact Factor: 2.201
2015 SCImago Journal Rankings: 0.902
References

 

DC FieldValueLanguage
dc.contributor.authorLai, PTen_HK
dc.contributor.authorLiu, Ben_HK
dc.contributor.authorZheng, Xen_HK
dc.contributor.authorLi, Ben_HK
dc.contributor.authorZhang, Sen_HK
dc.contributor.authorWu, Zen_HK
dc.date.accessioned2010-09-06T06:54:08Z-
dc.date.available2010-09-06T06:54:08Z-
dc.date.issued1997en_HK
dc.identifier.citationSensors And Actuators, A: Physical, 1997, v. 58 n. 1, p. 85-88en_HK
dc.identifier.issn0924-4247en_HK
dc.identifier.urihttp://hdl.handle.net/10722/73722-
dc.description.abstractA simple integrated flow sensor, with silicon spreading-resistance (SR) as the temperature-sensing element, has been designed and fabricated by a standard IC process. The operation of this spreading-resistance silicon flow (SRSF) sensor is based on the transfer of heat from a heated chip to a flowing fluid. The temperature difference on the chip is a measure of the flow velocity. Measurements are given for velocities up to about 4 m s-1 for air at room temperature, and higher sensor output is obtained for a higher temperature difference between the chip and flow. The SRSF sensor shows good prospects in applications involving velocity and direction sensitivities, and has great potential for flows of temperature higher than the intrinsic temperature of silicon ( ≈ 150°C) because the SR can sense higher temperature than conventional device structures.en_HK
dc.languageengen_HK
dc.publisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/snaen_HK
dc.relation.ispartofSensors and Actuators, A: Physicalen_HK
dc.subjectFlow sensorsen_HK
dc.subjectMonolithic integrationen_HK
dc.subjectSiliconen_HK
dc.subjectSpreading-resistanceen_HK
dc.subjectTemperature-sensing elementsen_HK
dc.titleMonolithic integrated spreading-resistance silicon flow sensoren_HK
dc.typeArticleen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0924-4247&volume=58&spage=85&epage=88&date=1997&atitle=Monolithic+integrated+spreading-resistance+silicon+flow+sensoren_HK
dc.identifier.emailLai, PT:laip@eee.hku.hken_HK
dc.identifier.authorityLai, PT=rp00130en_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-0030653835en_HK
dc.identifier.hkuros26282en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0030653835&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume58en_HK
dc.identifier.issue1en_HK
dc.identifier.spage85en_HK
dc.identifier.epage88en_HK
dc.publisher.placeSwitzerlanden_HK
dc.identifier.scopusauthoridLai, PT=7202946460en_HK
dc.identifier.scopusauthoridLiu, B=7408690364en_HK
dc.identifier.scopusauthoridZheng, X=7404091424en_HK
dc.identifier.scopusauthoridLi, B=26643217800en_HK
dc.identifier.scopusauthoridZhang, S=7409376161en_HK
dc.identifier.scopusauthoridWu, Z=7501411463en_HK

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