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Conference Paper: Nanopatterning GaN with microspheres
Title | Nanopatterning GaN with microspheres |
---|---|
Authors | |
Issue Date | 2008 |
Publisher | Wiley - VCH Verlag GmbH & Co KGaA. The Journal's web site is located at http://www3.interscience.wiley.com/cgi-bin/jhome/102519628 |
Citation | The 7th International Conference on Nitride Semiconductors (ICNS-7), Las Vegas, NV., 16-21 September 2007. In Physica Status Solidi (C) Current Topics In Solid State Physics, 2008, v. 5 n. 6, p. 1615-1617 How to Cite? |
Abstract | In this work, the fabrication and characterization of nanopillar arrays on GaN substrates using the technique of microsphere lithography have been demonstrated. Self-assembled hexagonally-packed silica microsphere array were formed on GaN wafers by the methods of spin coating and tilting. By precisely controlling the process parameters, a monolayer of microsphere array can be formed over a wide region, acting as a hard-mask for pattern transfer of the nanostructures. After dry etching, arrays of nano-pillars were formed on the surface of the wafer. The structure properties of the ordered nanostructures were characterized by SEM images, while photoluminescence (PL) measurements revealed a twofold enhancement of light emission intensity. © 2008 Wiley-VCH Verlag GmbH & Co. KGaA. |
Description | This journal issue entitled: Special Issue: 7th International Conference on Nitride Semiconductors (ICNS-7) |
Persistent Identifier | http://hdl.handle.net/10722/73685 |
ISSN | 2020 SCImago Journal Rankings: 0.210 |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ng, WN | en_HK |
dc.contributor.author | Wang, X | en_HK |
dc.contributor.author | Leung, CH | en_HK |
dc.contributor.author | Lai, PT | en_HK |
dc.contributor.author | Choi, HW | en_HK |
dc.creator | sml 151028 - merged | - |
dc.date.accessioned | 2010-09-06T06:53:46Z | - |
dc.date.available | 2010-09-06T06:53:46Z | - |
dc.date.issued | 2008 | en_HK |
dc.identifier.citation | The 7th International Conference on Nitride Semiconductors (ICNS-7), Las Vegas, NV., 16-21 September 2007. In Physica Status Solidi (C) Current Topics In Solid State Physics, 2008, v. 5 n. 6, p. 1615-1617 | en_HK |
dc.identifier.issn | 1862-6351 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/73685 | - |
dc.description | This journal issue entitled: Special Issue: 7th International Conference on Nitride Semiconductors (ICNS-7) | - |
dc.description.abstract | In this work, the fabrication and characterization of nanopillar arrays on GaN substrates using the technique of microsphere lithography have been demonstrated. Self-assembled hexagonally-packed silica microsphere array were formed on GaN wafers by the methods of spin coating and tilting. By precisely controlling the process parameters, a monolayer of microsphere array can be formed over a wide region, acting as a hard-mask for pattern transfer of the nanostructures. After dry etching, arrays of nano-pillars were formed on the surface of the wafer. The structure properties of the ordered nanostructures were characterized by SEM images, while photoluminescence (PL) measurements revealed a twofold enhancement of light emission intensity. © 2008 Wiley-VCH Verlag GmbH & Co. KGaA. | en_HK |
dc.language | eng | en_HK |
dc.publisher | Wiley - VCH Verlag GmbH & Co KGaA. The Journal's web site is located at http://www3.interscience.wiley.com/cgi-bin/jhome/102519628 | en_HK |
dc.relation.ispartof | Physica Status Solidi (C) Current Topics in Solid State Physics | en_HK |
dc.title | Nanopatterning GaN with microspheres | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.openurl | http://library.hku.hk:4550/resserv?sid=HKU:IR&issn=1610-1634&volume=5&spage=1615&epage=&date=2008&atitle=Nanopatterning+GaN+with+Microspheres | en_HK |
dc.identifier.email | Leung, CH:chleung@eee.hku.hk | en_HK |
dc.identifier.email | Lai, PT:laip@eee.hku.hk | en_HK |
dc.identifier.email | Choi, HW:hwchoi@eee.hku.hk | en_HK |
dc.identifier.authority | Leung, CH=rp00146 | en_HK |
dc.identifier.authority | Lai, PT=rp00130 | en_HK |
dc.identifier.authority | Choi, HW=rp00108 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1002/pssc.200778540 | en_HK |
dc.identifier.scopus | eid_2-s2.0-77951220945 | en_HK |
dc.identifier.hkuros | 146757 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-77951220945&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 5 | en_HK |
dc.identifier.issue | 6 | en_HK |
dc.identifier.spage | 1615 | en_HK |
dc.identifier.epage | 1617 | en_HK |
dc.publisher.place | Germany | en_HK |
dc.identifier.hkulrp | 150354 | - |
dc.identifier.scopusauthorid | Ng, WN=23486567300 | en_HK |
dc.identifier.scopusauthorid | Wang, XH=34168501000 | en_HK |
dc.identifier.scopusauthorid | Leung, CH=7402612415 | en_HK |
dc.identifier.scopusauthorid | Lai, PT=7202946460 | en_HK |
dc.identifier.scopusauthorid | Choi, HW=7404334877 | en_HK |
dc.identifier.issnl | 1610-1634 | - |