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Article: Fabrication and characterization of diamond micro-optics

TitleFabrication and characterization of diamond micro-optics
Authors
KeywordsEtching
Natural and synthetic diamonds
Optical properties
Surface characterization
Issue Date2006
PublisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/diamond
Citation
Diamond And Related Materials, 2006, v. 15 n. 4-8, p. 725-728 How to Cite?
AbstractOwing to its hardness and chemical inertness, most of the previous studies to fabricate structures and devices on diamond have used the conventional Reactive Ion Etching (RIE). Recently, etching of diamond using Inductively Coupled Plasma (ICP) system was reported to have a higher etch rate than using RIE. In this work, ICP etching with Ar/O 2 plasma has been employed to fabricate micro-optics on both natural diamond and high-pressure, high-temperature (HPHT) synthetic diamond. The diamond etch rate has been studied as a function of ICP platen power, coil power and gas pressure. The etch rate is shown to increase with increasing ICP platen and coil powers. Arrays of negative (concave) and positive (convex) diamond microlenses with diameters ranging from 10 to 100 μm were fabricated using hot-embossing and photoresist re-flow methods, respectively, followed by ICP etching. Surface morphology of these diamond micro-lenses was characterized by using both Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). These measurements show that the natural diamond micro-lenses have root-mean-squared surface roughness of 1.2 nm. The optical properties of the convex diamond microlens arrays, such as focal length and spot size, were characterised by a laser scanning reflection/transmission confocal microscopy technique. The measured optical parameters are close to the calculated values, confirming that the fabricated diamond lenses have a high-quality surface profile. © 2005 Elsevier B.V. All rights reserved.
Persistent Identifierhttp://hdl.handle.net/10722/73615
ISSN
2015 Impact Factor: 2.125
2015 SCImago Journal Rankings: 0.707
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorLee, CLen_HK
dc.contributor.authorChoi, HWen_HK
dc.contributor.authorGu, Een_HK
dc.contributor.authorDawson, MDen_HK
dc.contributor.authorMurphy, Hen_HK
dc.date.accessioned2010-09-06T06:53:05Z-
dc.date.available2010-09-06T06:53:05Z-
dc.date.issued2006en_HK
dc.identifier.citationDiamond And Related Materials, 2006, v. 15 n. 4-8, p. 725-728en_HK
dc.identifier.issn0925-9635en_HK
dc.identifier.urihttp://hdl.handle.net/10722/73615-
dc.description.abstractOwing to its hardness and chemical inertness, most of the previous studies to fabricate structures and devices on diamond have used the conventional Reactive Ion Etching (RIE). Recently, etching of diamond using Inductively Coupled Plasma (ICP) system was reported to have a higher etch rate than using RIE. In this work, ICP etching with Ar/O 2 plasma has been employed to fabricate micro-optics on both natural diamond and high-pressure, high-temperature (HPHT) synthetic diamond. The diamond etch rate has been studied as a function of ICP platen power, coil power and gas pressure. The etch rate is shown to increase with increasing ICP platen and coil powers. Arrays of negative (concave) and positive (convex) diamond microlenses with diameters ranging from 10 to 100 μm were fabricated using hot-embossing and photoresist re-flow methods, respectively, followed by ICP etching. Surface morphology of these diamond micro-lenses was characterized by using both Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). These measurements show that the natural diamond micro-lenses have root-mean-squared surface roughness of 1.2 nm. The optical properties of the convex diamond microlens arrays, such as focal length and spot size, were characterised by a laser scanning reflection/transmission confocal microscopy technique. The measured optical parameters are close to the calculated values, confirming that the fabricated diamond lenses have a high-quality surface profile. © 2005 Elsevier B.V. All rights reserved.en_HK
dc.languageengen_HK
dc.publisherElsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/diamonden_HK
dc.relation.ispartofDiamond and Related Materialsen_HK
dc.subjectEtchingen_HK
dc.subjectNatural and synthetic diamondsen_HK
dc.subjectOptical propertiesen_HK
dc.subjectSurface characterizationen_HK
dc.titleFabrication and characterization of diamond micro-opticsen_HK
dc.typeArticleen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0925-9635&volume=15&spage=725&epage=&date=2006&atitle=Fabrication+and+Characterization+of+diamond+micro-opticsen_HK
dc.identifier.emailChoi, HW:hwchoi@eee.hku.hken_HK
dc.identifier.authorityChoi, HW=rp00108en_HK
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1016/j.diamond.2005.09.033en_HK
dc.identifier.scopuseid_2-s2.0-33745283358en_HK
dc.identifier.hkuros117051en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-33745283358&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume15en_HK
dc.identifier.issue4-8en_HK
dc.identifier.spage725en_HK
dc.identifier.epage728en_HK
dc.identifier.isiWOS:000239157000056-
dc.publisher.placeSwitzerlanden_HK
dc.identifier.scopusauthoridLee, CL=35201123600en_HK
dc.identifier.scopusauthoridChoi, HW=7404334877en_HK
dc.identifier.scopusauthoridGu, E=7004420026en_HK
dc.identifier.scopusauthoridDawson, MD=7203061779en_HK
dc.identifier.scopusauthoridMurphy, H=55179865700en_HK

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