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Article: Projection optics design for tilted projection of fringe patterns
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TitleProjection optics design for tilted projection of fringe patterns
 
AuthorsShu, Y4
Chung, R4
Tan, Z3
Cheng, J4
Lam, EY2
Fung, KSM1
Wang, F1
 
Keywords3-D from structured light
depth of field
field of view
lens design
machine vision
modulation transfer function
 
Issue Date2008
 
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/oe
 
CitationOptical Engineering, 2008, v. 47 n. 5 [How to Cite?]
DOI: http://dx.doi.org/10.1117/1.2931457
 
AbstractA challenge in the semiconductor industry is 3-D inspection of the miniaturized solder bumps grown on wafers for direct die-to-die bonding. An inspection mechanism proposed earlier requires the projection of a binary fringe grating to the inspected surface from an inclined angle. For high speed and accuracy of the mechanism, the projection optics has to meet these requirements: (1) it allows a tilt angle between the inspected surface and the projector's optical axis; (2) it has a high bandwidth to let high-spatial-frequency harmonics contained in the binary grating pass through the lens and be projected onto the inspected surface properly; (3) it has a high modulation transfer function; (4) it has a large field of view; and (5) it has an adequate depth of field that matches the depth range of the inspected surface. In this paper, we describe a projection optics design, consisting of a fringe grating and several pieces of spherical lens, that addresses the requirements. To reduce the lens aberrations, the grating is laid out with an angle chosen specifically to make the grating, the lens, and the average plane of the inspected surface intersect in the same line. Performance analysis and tolerance analysis are shown to demonstrate the feasibility of the design. © 2008 Society of Photo-Optical Instrumentation Engineers.
 
ISSN0091-3286
2013 Impact Factor: 0.958
2013 SCImago Journal Rankings: 0.482
 
DOIhttp://dx.doi.org/10.1117/1.2931457
 
ISI Accession Number IDWOS:000257227100006
 
ReferencesReferences in Scopus
 
DC FieldValue
dc.contributor.authorShu, Y
 
dc.contributor.authorChung, R
 
dc.contributor.authorTan, Z
 
dc.contributor.authorCheng, J
 
dc.contributor.authorLam, EY
 
dc.contributor.authorFung, KSM
 
dc.contributor.authorWang, F
 
dc.date.accessioned2010-04-12T01:37:01Z
 
dc.date.available2010-04-12T01:37:01Z
 
dc.date.issued2008
 
dc.description.abstractA challenge in the semiconductor industry is 3-D inspection of the miniaturized solder bumps grown on wafers for direct die-to-die bonding. An inspection mechanism proposed earlier requires the projection of a binary fringe grating to the inspected surface from an inclined angle. For high speed and accuracy of the mechanism, the projection optics has to meet these requirements: (1) it allows a tilt angle between the inspected surface and the projector's optical axis; (2) it has a high bandwidth to let high-spatial-frequency harmonics contained in the binary grating pass through the lens and be projected onto the inspected surface properly; (3) it has a high modulation transfer function; (4) it has a large field of view; and (5) it has an adequate depth of field that matches the depth range of the inspected surface. In this paper, we describe a projection optics design, consisting of a fringe grating and several pieces of spherical lens, that addresses the requirements. To reduce the lens aberrations, the grating is laid out with an angle chosen specifically to make the grating, the lens, and the average plane of the inspected surface intersect in the same line. Performance analysis and tolerance analysis are shown to demonstrate the feasibility of the design. © 2008 Society of Photo-Optical Instrumentation Engineers.
 
dc.description.naturepublished_or_final_version
 
dc.identifier.citationOptical Engineering, 2008, v. 47 n. 5 [How to Cite?]
DOI: http://dx.doi.org/10.1117/1.2931457
 
dc.identifier.doihttp://dx.doi.org/10.1117/1.2931457
 
dc.identifier.hkuros143605
 
dc.identifier.isiWOS:000257227100006
 
dc.identifier.issn0091-3286
2013 Impact Factor: 0.958
2013 SCImago Journal Rankings: 0.482
 
dc.identifier.issue5
 
dc.identifier.openurl
 
dc.identifier.scopuseid_2-s2.0-73649110258
 
dc.identifier.urihttp://hdl.handle.net/10722/57446
 
dc.identifier.volume47
 
dc.languageeng
 
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/oe
 
dc.publisher.placeUnited States
 
dc.relation.ispartofOptical Engineering
 
dc.relation.referencesReferences in Scopus
 
dc.rightsOptical Engineering. Copyright © S P I E - International Society for Optical Engineering.
 
dc.rightsCreative Commons: Attribution 3.0 Hong Kong License
 
dc.rightsCopyright 2008 Society of Photo-Optical Instrumentation Engineers.This paper was published in Optical Engineering and is made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
 
dc.subject3-D from structured light
 
dc.subjectdepth of field
 
dc.subjectfield of view
 
dc.subjectlens design
 
dc.subjectmachine vision
 
dc.subjectmodulation transfer function
 
dc.titleProjection optics design for tilted projection of fringe patterns
 
dc.typeArticle
 
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Author Affiliations
  1. ASM Assembly Automation Limited
  2. The University of Hong Kong
  3. Xi'an Jiaotong University
  4. Chinese University of Hong Kong