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Article: Projection optics design for tilted projection of fringe patterns
Title | Projection optics design for tilted projection of fringe patterns |
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Authors | |
Keywords | 3-D from structured light depth of field field of view lens design machine vision modulation transfer function |
Issue Date | 2008 |
Publisher | S P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/oe |
Citation | Optical Engineering, 2008, v. 47 n. 5, article no. 053002 How to Cite? |
Abstract | A challenge in the semiconductor industry is 3-D inspection of the miniaturized solder bumps grown on wafers for direct die-to-die bonding. An inspection mechanism proposed earlier requires the projection of a binary fringe grating to the inspected surface from an inclined angle. For high speed and accuracy of the mechanism, the projection optics has to meet these requirements: (1) it allows a tilt angle between the inspected surface and the projector's optical axis; (2) it has a high bandwidth to let high-spatial-frequency harmonics contained in the binary grating pass through the lens and be projected onto the inspected surface properly; (3) it has a high modulation transfer function; (4) it has a large field of view; and (5) it has an adequate depth of field that matches the depth range of the inspected surface. In this paper, we describe a projection optics design, consisting of a fringe grating and several pieces of spherical lens, that addresses the requirements. To reduce the lens aberrations, the grating is laid out with an angle chosen specifically to make the grating, the lens, and the average plane of the inspected surface intersect in the same line. Performance analysis and tolerance analysis are shown to demonstrate the feasibility of the design. © 2008 Society of Photo-Optical Instrumentation Engineers. |
Persistent Identifier | http://hdl.handle.net/10722/57446 |
ISSN | 2021 Impact Factor: 1.352 2020 SCImago Journal Rankings: 0.357 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shu, Y | en_HK |
dc.contributor.author | Chung, R | en_HK |
dc.contributor.author | Tan, Z | en_HK |
dc.contributor.author | Cheng, J | en_HK |
dc.contributor.author | Lam, EY | en_HK |
dc.contributor.author | Fung, KSM | en_HK |
dc.contributor.author | Wang, F | en_HK |
dc.date.accessioned | 2010-04-12T01:37:01Z | - |
dc.date.available | 2010-04-12T01:37:01Z | - |
dc.date.issued | 2008 | en_HK |
dc.identifier.citation | Optical Engineering, 2008, v. 47 n. 5, article no. 053002 | en_HK |
dc.identifier.issn | 0091-3286 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/57446 | - |
dc.description.abstract | A challenge in the semiconductor industry is 3-D inspection of the miniaturized solder bumps grown on wafers for direct die-to-die bonding. An inspection mechanism proposed earlier requires the projection of a binary fringe grating to the inspected surface from an inclined angle. For high speed and accuracy of the mechanism, the projection optics has to meet these requirements: (1) it allows a tilt angle between the inspected surface and the projector's optical axis; (2) it has a high bandwidth to let high-spatial-frequency harmonics contained in the binary grating pass through the lens and be projected onto the inspected surface properly; (3) it has a high modulation transfer function; (4) it has a large field of view; and (5) it has an adequate depth of field that matches the depth range of the inspected surface. In this paper, we describe a projection optics design, consisting of a fringe grating and several pieces of spherical lens, that addresses the requirements. To reduce the lens aberrations, the grating is laid out with an angle chosen specifically to make the grating, the lens, and the average plane of the inspected surface intersect in the same line. Performance analysis and tolerance analysis are shown to demonstrate the feasibility of the design. © 2008 Society of Photo-Optical Instrumentation Engineers. | en_HK |
dc.language | eng | en_HK |
dc.publisher | S P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/oe | en_HK |
dc.relation.ispartof | Optical Engineering | en_HK |
dc.rights | Copyright 2008 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited. This article is available online at https://doi.org/10.1117/1.2931457 | - |
dc.subject | 3-D from structured light | en_HK |
dc.subject | depth of field | en_HK |
dc.subject | field of view | en_HK |
dc.subject | lens design | en_HK |
dc.subject | machine vision | en_HK |
dc.subject | modulation transfer function | en_HK |
dc.title | Projection optics design for tilted projection of fringe patterns | en_HK |
dc.type | Article | en_HK |
dc.identifier.email | Lam, EY:elam@eee.hku.hk | en_HK |
dc.identifier.authority | Lam, EY=rp00131 | en_HK |
dc.description.nature | published_or_final_version | en_HK |
dc.identifier.doi | 10.1117/1.2931457 | en_HK |
dc.identifier.scopus | eid_2-s2.0-73649110258 | en_HK |
dc.identifier.hkuros | 143605 | - |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-73649110258&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 47 | en_HK |
dc.identifier.issue | 5 | en_HK |
dc.identifier.spage | article no. 053002 | - |
dc.identifier.epage | article no. 053002 | - |
dc.identifier.isi | WOS:000257227100006 | - |
dc.publisher.place | United States | en_HK |
dc.identifier.scopusauthorid | Shu, Y=36906608600 | en_HK |
dc.identifier.scopusauthorid | Chung, R=7202439610 | en_HK |
dc.identifier.scopusauthorid | Tan, Z=35738104600 | en_HK |
dc.identifier.scopusauthorid | Cheng, J=14057685600 | en_HK |
dc.identifier.scopusauthorid | Lam, EY=7102890004 | en_HK |
dc.identifier.scopusauthorid | Fung, KSM=8627247700 | en_HK |
dc.identifier.scopusauthorid | Wang, F=54386379800 | en_HK |
dc.identifier.issnl | 0091-3286 | - |