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Article: Projection optics design for tilted projection of fringe patterns

TitleProjection optics design for tilted projection of fringe patterns
Authors
Keywords3-D from structured light
depth of field
field of view
lens design
machine vision
modulation transfer function
Issue Date2008
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/oe
Citation
Optical Engineering, 2008, v. 47 n. 5 How to Cite?
Abstract
A challenge in the semiconductor industry is 3-D inspection of the miniaturized solder bumps grown on wafers for direct die-to-die bonding. An inspection mechanism proposed earlier requires the projection of a binary fringe grating to the inspected surface from an inclined angle. For high speed and accuracy of the mechanism, the projection optics has to meet these requirements: (1) it allows a tilt angle between the inspected surface and the projector's optical axis; (2) it has a high bandwidth to let high-spatial-frequency harmonics contained in the binary grating pass through the lens and be projected onto the inspected surface properly; (3) it has a high modulation transfer function; (4) it has a large field of view; and (5) it has an adequate depth of field that matches the depth range of the inspected surface. In this paper, we describe a projection optics design, consisting of a fringe grating and several pieces of spherical lens, that addresses the requirements. To reduce the lens aberrations, the grating is laid out with an angle chosen specifically to make the grating, the lens, and the average plane of the inspected surface intersect in the same line. Performance analysis and tolerance analysis are shown to demonstrate the feasibility of the design. © 2008 Society of Photo-Optical Instrumentation Engineers.
Persistent Identifierhttp://hdl.handle.net/10722/57446
ISSN
2013 Impact Factor: 0.958
2013 SCImago Journal Rankings: 0.482
ISI Accession Number ID
References

 

Author Affiliations
  1. ASM Assembly Automation Limited
  2. The University of Hong Kong
  3. Xi'an Jiaotong University
  4. Chinese University of Hong Kong
DC FieldValueLanguage
dc.contributor.authorShu, Yen_HK
dc.contributor.authorChung, Ren_HK
dc.contributor.authorTan, Zen_HK
dc.contributor.authorCheng, Jen_HK
dc.contributor.authorLam, EYen_HK
dc.contributor.authorFung, KSMen_HK
dc.contributor.authorWang, Fen_HK
dc.date.accessioned2010-04-12T01:37:01Z-
dc.date.available2010-04-12T01:37:01Z-
dc.date.issued2008en_HK
dc.identifier.citationOptical Engineering, 2008, v. 47 n. 5en_HK
dc.identifier.issn0091-3286en_HK
dc.identifier.urihttp://hdl.handle.net/10722/57446-
dc.description.abstractA challenge in the semiconductor industry is 3-D inspection of the miniaturized solder bumps grown on wafers for direct die-to-die bonding. An inspection mechanism proposed earlier requires the projection of a binary fringe grating to the inspected surface from an inclined angle. For high speed and accuracy of the mechanism, the projection optics has to meet these requirements: (1) it allows a tilt angle between the inspected surface and the projector's optical axis; (2) it has a high bandwidth to let high-spatial-frequency harmonics contained in the binary grating pass through the lens and be projected onto the inspected surface properly; (3) it has a high modulation transfer function; (4) it has a large field of view; and (5) it has an adequate depth of field that matches the depth range of the inspected surface. In this paper, we describe a projection optics design, consisting of a fringe grating and several pieces of spherical lens, that addresses the requirements. To reduce the lens aberrations, the grating is laid out with an angle chosen specifically to make the grating, the lens, and the average plane of the inspected surface intersect in the same line. Performance analysis and tolerance analysis are shown to demonstrate the feasibility of the design. © 2008 Society of Photo-Optical Instrumentation Engineers.en_HK
dc.languageengen_HK
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/oeen_HK
dc.relation.ispartofOptical Engineeringen_HK
dc.rightsOptical Engineering. Copyright © S P I E - International Society for Optical Engineering.en_HK
dc.rightsCreative Commons: Attribution 3.0 Hong Kong License-
dc.rightsCopyright 2008 Society of Photo-Optical Instrumentation Engineers.This paper was published in Optical Engineering and is made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.en_HK
dc.subject3-D from structured lighten_HK
dc.subjectdepth of fielden_HK
dc.subjectfield of viewen_HK
dc.subjectlens designen_HK
dc.subjectmachine visionen_HK
dc.subjectmodulation transfer functionen_HK
dc.titleProjection optics design for tilted projection of fringe patternsen_HK
dc.typeArticleen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0091-3286&volume=47&issue=5&spage=053002&epage=1 &date=2008&atitle=Projection+optics+design+for+tilted+projection+of+fringe+patternsen_HK
dc.identifier.emailLam, EY:elam@eee.hku.hken_HK
dc.identifier.authorityLam, EY=rp00131en_HK
dc.description.naturepublished_or_final_versionen_HK
dc.identifier.doi10.1117/1.2931457en_HK
dc.identifier.scopuseid_2-s2.0-73649110258en_HK
dc.identifier.hkuros143605-
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-73649110258&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume47en_HK
dc.identifier.issue5en_HK
dc.identifier.isiWOS:000257227100006-
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridShu, Y=36906608600en_HK
dc.identifier.scopusauthoridChung, R=7202439610en_HK
dc.identifier.scopusauthoridTan, Z=35738104600en_HK
dc.identifier.scopusauthoridCheng, J=14057685600en_HK
dc.identifier.scopusauthoridLam, EY=7102890004en_HK
dc.identifier.scopusauthoridFung, KSM=8627247700en_HK
dc.identifier.scopusauthoridWang, F=54386379800en_HK

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