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postgraduate thesis: Phase transformation and properties of magnetron co-sputtered GeSi thin films
| Title | Phase transformation and properties of magnetron co-sputtered GeSi thin films |
|---|---|
| Authors | |
| Advisors | Advisor(s):Ngan, AHW |
| Issue Date | 2008 |
| Publisher | The University of Hong Kong (Pokfulam, Hong Kong) |
| Citation | Xu, Z. [徐子文]. (2008). Phase transformation and properties of magnetron co-sputtered GeSi thin films. (Thesis). University of Hong Kong, Pokfulam, Hong Kong SAR. Retrieved from http://dx.doi.org/10.5353/th_b3984877 |
| Degree | Doctor of Philosophy |
| Subject | Thin films. Germanium. Silicon. Sputtering (Physics) Magnetrons. |
| Dept/Program | Mechanical Engineering |
| Persistent Identifier | http://hdl.handle.net/10722/51933 |
| HKU Library Item ID | b3984877 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Ngan, AHW | - |
| dc.contributor.author | Xu, Ziwen. | - |
| dc.contributor.author | 徐子文. | - |
| dc.date.issued | 2008 | - |
| dc.identifier.citation | Xu, Z. [徐子文]. (2008). Phase transformation and properties of magnetron co-sputtered GeSi thin films. (Thesis). University of Hong Kong, Pokfulam, Hong Kong SAR. Retrieved from http://dx.doi.org/10.5353/th_b3984877 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/51933 | - |
| dc.language | eng | - |
| dc.publisher | The University of Hong Kong (Pokfulam, Hong Kong) | - |
| dc.relation.ispartof | HKU Theses Online (HKUTO) | - |
| dc.rights | The author retains all proprietary rights, (such as patent rights) and the right to use in future works. | - |
| dc.rights | This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License. | - |
| dc.source.uri | http://hub.hku.hk/bib/B39848772 | - |
| dc.subject.lcsh | Thin films. | - |
| dc.subject.lcsh | Germanium. | - |
| dc.subject.lcsh | Silicon. | - |
| dc.subject.lcsh | Sputtering (Physics) | - |
| dc.subject.lcsh | Magnetrons. | - |
| dc.title | Phase transformation and properties of magnetron co-sputtered GeSi thin films | - |
| dc.type | PG_Thesis | - |
| dc.identifier.hkul | b3984877 | - |
| dc.description.thesisname | Doctor of Philosophy | - |
| dc.description.thesislevel | Doctoral | - |
| dc.description.thesisdiscipline | Mechanical Engineering | - |
| dc.description.nature | published_or_final_version | - |
| dc.identifier.doi | 10.5353/th_b3984877 | - |
| dc.date.hkucongregation | 2008 | - |
| dc.identifier.mmsid | 991023096619703414 | - |