File Download
  Links for fulltext
     (May Require Subscription)
Supplementary

postgraduate thesis: Phase transformation and properties of magnetron co-sputtered GeSi thin films

TitlePhase transformation and properties of magnetron co-sputtered GeSi thin films
Authors
Advisors
Advisor(s):Ngan, AHW
Issue Date2008
PublisherThe University of Hong Kong (Pokfulam, Hong Kong)
Citation
Xu, Z. [徐子文]. (2008). Phase transformation and properties of magnetron co-sputtered GeSi thin films. (Thesis). University of Hong Kong, Pokfulam, Hong Kong SAR. Retrieved from http://dx.doi.org/10.5353/th_b3984877
DegreeDoctor of Philosophy
SubjectThin films.
Germanium.
Silicon.
Sputtering (Physics)
Magnetrons.
Dept/ProgramMechanical Engineering

 

DC FieldValueLanguage
dc.contributor.advisorNgan, AHW-
dc.contributor.authorXu, Ziwen.-
dc.contributor.author徐子文.-
dc.date.issued2008-
dc.identifier.citationXu, Z. [徐子文]. (2008). Phase transformation and properties of magnetron co-sputtered GeSi thin films. (Thesis). University of Hong Kong, Pokfulam, Hong Kong SAR. Retrieved from http://dx.doi.org/10.5353/th_b3984877-
dc.languageeng-
dc.publisherThe University of Hong Kong (Pokfulam, Hong Kong)-
dc.relation.ispartofHKU Theses Online (HKUTO)-
dc.rightsThe author retains all proprietary rights, (such as patent rights) and the right to use in future works.-
dc.rightsCreative Commons: Attribution 3.0 Hong Kong License-
dc.source.urihttp://hub.hku.hk/bib/B39848772-
dc.subject.lcshThin films.-
dc.subject.lcshGermanium.-
dc.subject.lcshSilicon.-
dc.subject.lcshSputtering (Physics)-
dc.subject.lcshMagnetrons.-
dc.titlePhase transformation and properties of magnetron co-sputtered GeSi thin films-
dc.typePG_Thesis-
dc.identifier.hkulb3984877-
dc.description.thesisnameDoctor of Philosophy-
dc.description.thesislevelDoctoral-
dc.description.thesisdisciplineMechanical Engineering-
dc.description.naturepublished_or_final_version-
dc.identifier.doi10.5353/th_b3984877-
dc.date.hkucongregation2008-

Export via OAI-PMH Interface in XML Formats


OR


Export to Other Non-XML Formats