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Article: Fabrication and evaluation of GaN negative and bifocal microlenses

TitleFabrication and evaluation of GaN negative and bifocal microlenses
Authors
KeywordsPhysics engineering
Issue Date2005
PublisherAmerican Institute of Physics. The Journal's web site is located at http://jap.aip.org/jap/staff.jsp
Citation
Journal Of Applied Physics, 2005, v. 97 n. 6 How to Cite?
AbstractMethods of fabricating negative and bifocal microlens arrays have been demonstrated in this paper. The technique of photoresist molding using a sapphire positive lens template was used for the patterning of negative microlenses, while the bifocal microlens arrays were fabricated using a two-step etch process. In both cases, the lenses were etched using inductively coupled plasma. Microlenses with diameters as small as 10 μm have been demonstrated and were characterized using atomic force microscopy and confocal microscopy. The lens arrays were found to be smooth, uniform, and to have focal lengths consistent with their design and calculated values. © 2005 American Institute of Physics.
Persistent Identifierhttp://hdl.handle.net/10722/42684
ISSN
2015 Impact Factor: 2.101
2015 SCImago Journal Rankings: 0.603
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorChoi, HWen_HK
dc.contributor.authorGu, Een_HK
dc.contributor.authorLiu, Cen_HK
dc.contributor.authorGirkin, JMen_HK
dc.contributor.authorDawson, MDen_HK
dc.date.accessioned2007-03-23T04:30:01Z-
dc.date.available2007-03-23T04:30:01Z-
dc.date.issued2005en_HK
dc.identifier.citationJournal Of Applied Physics, 2005, v. 97 n. 6en_HK
dc.identifier.issn0021-8979en_HK
dc.identifier.urihttp://hdl.handle.net/10722/42684-
dc.description.abstractMethods of fabricating negative and bifocal microlens arrays have been demonstrated in this paper. The technique of photoresist molding using a sapphire positive lens template was used for the patterning of negative microlenses, while the bifocal microlens arrays were fabricated using a two-step etch process. In both cases, the lenses were etched using inductively coupled plasma. Microlenses with diameters as small as 10 μm have been demonstrated and were characterized using atomic force microscopy and confocal microscopy. The lens arrays were found to be smooth, uniform, and to have focal lengths consistent with their design and calculated values. © 2005 American Institute of Physics.en_HK
dc.format.extent694174 bytes-
dc.format.extent27136 bytes-
dc.format.mimetypeapplication/pdf-
dc.format.mimetypeapplication/msword-
dc.languageengen_HK
dc.publisherAmerican Institute of Physics. The Journal's web site is located at http://jap.aip.org/jap/staff.jspen_HK
dc.relation.ispartofJournal of Applied Physicsen_HK
dc.rightsCreative Commons: Attribution 3.0 Hong Kong License-
dc.subjectPhysics engineeringen_HK
dc.titleFabrication and evaluation of GaN negative and bifocal microlensesen_HK
dc.typeArticleen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0021-8979&volume=97&spage=063101:1&epage=3&date=2005&atitle=Fabrication+and+Evaluation+of+GaN+Negative+and+Bifocal+Microlensesen_HK
dc.identifier.emailChoi, HW:hwchoi@eee.hku.hken_HK
dc.identifier.authorityChoi, HW=rp00108en_HK
dc.description.naturepublished_or_final_versionen_HK
dc.identifier.doi10.1063/1.1857062en_HK
dc.identifier.scopuseid_2-s2.0-20444506417en_HK
dc.identifier.hkuros100422-
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-20444506417&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume97en_HK
dc.identifier.issue6en_HK
dc.identifier.isiWOS:000227767700002-
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridChoi, HW=7404334877en_HK
dc.identifier.scopusauthoridGu, E=7004420026en_HK
dc.identifier.scopusauthoridLiu, C=36064477300en_HK
dc.identifier.scopusauthoridGirkin, JM=6701651108en_HK
dc.identifier.scopusauthoridDawson, MD=7203061779en_HK

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