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Title | Author(s) | Issue Date | Views | |
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Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures Journal:Electronics Letters | 2008 | 3 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures Journal:Electronics Letters | 2008 | 3 |