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postgraduate thesis: A study of integrated semiconductor thin-film sensors on sio2/si substrate

TitleA study of integrated semiconductor thin-film sensors on sio2/si substrate
Authors
Issue Date2001
PublisherThe University of Hong Kong (Pokfulam, Hong Kong)
Citation
Li, B. [李斌]. (2001). A study of integrated semiconductor thin-film sensors on sio2/si substrate. (Thesis). University of Hong Kong, Pokfulam, Hong Kong SAR. Retrieved from http://dx.doi.org/10.5353/th_b3044675
DegreeDoctor of Philosophy
SubjectThin film devices.
Silicon.
Dept/ProgramElectrical and Electronic Engineering
Persistent Identifierhttp://hdl.handle.net/10722/31460
HKU Library Item IDb3044675

 

DC FieldValueLanguage
dc.contributor.authorLi, Bin-
dc.contributor.author李斌-
dc.date.issued2001-
dc.identifier.citationLi, B. [李斌]. (2001). A study of integrated semiconductor thin-film sensors on sio2/si substrate. (Thesis). University of Hong Kong, Pokfulam, Hong Kong SAR. Retrieved from http://dx.doi.org/10.5353/th_b3044675-
dc.identifier.urihttp://hdl.handle.net/10722/31460-
dc.languageeng-
dc.publisherThe University of Hong Kong (Pokfulam, Hong Kong)-
dc.relation.ispartofHKU Theses Online (HKUTO)-
dc.rightsThe author retains all proprietary rights, (such as patent rights) and the right to use in future works.-
dc.rightsThis work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.-
dc.source.urihttp://hub.hku.hk/bib/B30446752-
dc.subject.lcshThin film devices.-
dc.subject.lcshSilicon.-
dc.titleA study of integrated semiconductor thin-film sensors on sio2/si substrate-
dc.typePG_Thesis-
dc.identifier.hkulb3044675-
dc.description.thesisnameDoctor of Philosophy-
dc.description.thesislevelDoctoral-
dc.description.thesisdisciplineElectrical and Electronic Engineering-
dc.description.naturepublished_or_final_version-
dc.description.natureabstract-
dc.description.naturetoc-
dc.identifier.doi10.5353/th_b3044675-
dc.date.hkucongregation2001-
dc.identifier.mmsid991010072799703414-

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