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Article: Investigation in the dynamic characteristic of the micro thermal sensor system
Title | Investigation in the dynamic characteristic of the micro thermal sensor system |
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Authors | |
Keywords | Thermal sensor MEMS Drive circuit Response frequency Time constant |
Issue Date | 2006 |
Citation | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2006, v. 27, n. 6, p. 648-652 How to Cite? |
Abstract | Through analyzing the operating principle of the micro thermal sensor, associating with the two types of drive circuits, the calculation and analysis methods of temporal and frequency characteristics of MEMS thermal sensor are got. Then the first order constant current sensor system and the second order constant temperature sensor system are investigated, and the design basis of the temporal and frequency characteristics of this type sensor is presented, which can offer reference to thermal sensor's device design and performance analysis. |
Persistent Identifier | http://hdl.handle.net/10722/265773 |
ISSN | 2023 SCImago Journal Rankings: 0.281 |
DC Field | Value | Language |
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dc.contributor.author | Liu, Kui | - |
dc.contributor.author | Yuan, Weizheng | - |
dc.contributor.author | Ma, Binghe | - |
dc.contributor.author | Deng, Jinjun | - |
dc.contributor.author | Jiang, Chengyu | - |
dc.date.accessioned | 2018-12-03T01:21:39Z | - |
dc.date.available | 2018-12-03T01:21:39Z | - |
dc.date.issued | 2006 | - |
dc.identifier.citation | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2006, v. 27, n. 6, p. 648-652 | - |
dc.identifier.issn | 0254-3087 | - |
dc.identifier.uri | http://hdl.handle.net/10722/265773 | - |
dc.description.abstract | Through analyzing the operating principle of the micro thermal sensor, associating with the two types of drive circuits, the calculation and analysis methods of temporal and frequency characteristics of MEMS thermal sensor are got. Then the first order constant current sensor system and the second order constant temperature sensor system are investigated, and the design basis of the temporal and frequency characteristics of this type sensor is presented, which can offer reference to thermal sensor's device design and performance analysis. | - |
dc.language | eng | - |
dc.relation.ispartof | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | - |
dc.subject | Thermal sensor MEMS | - |
dc.subject | Drive circuit | - |
dc.subject | Response frequency | - |
dc.subject | Time constant | - |
dc.title | Investigation in the dynamic characteristic of the micro thermal sensor system | - |
dc.type | Article | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.scopus | eid_2-s2.0-33748929668 | - |
dc.identifier.volume | 27 | - |
dc.identifier.issue | 6 | - |
dc.identifier.spage | 648 | - |
dc.identifier.epage | 652 | - |
dc.identifier.issnl | 0254-3087 | - |