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Article: Design investigation on micro thermal sensor film resistor

TitleDesign investigation on micro thermal sensor film resistor
Authors
KeywordsThermal device
Micro sensor
Film resistor
TCR
Issue Date2005
Citation
Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2005, v. 16, n. SUPPL., p. 202-204 How to Cite?
AbstractThrough analyzing the operating principles of the micro thermal sensor, associating with thin film resistor and the substrate, we got TCR of the resistor, and analyzed the method of calculation and measurement of the TCR and the resistively of MEMS thermal sensor. Then, we investigated the effectiveness of the resistor special dimension on the sensor performance. At last, we presented the design basis of the micro thermal sensor film material, the substrate, the dimension and the TCR of the thin film resistor, so we can offer references to thermal sensor's thin film resistor design and performance analysis.
Persistent Identifierhttp://hdl.handle.net/10722/265763
ISSN
2015 SCImago Journal Rankings: 0.258

 

DC FieldValueLanguage
dc.contributor.authorLiu, Kui-
dc.contributor.authorYuan, Weizheng-
dc.contributor.authorDeng, Jinjun-
dc.contributor.authorMa, Binghe-
dc.contributor.authorJiang, Chengyu-
dc.date.accessioned2018-12-03T01:21:37Z-
dc.date.available2018-12-03T01:21:37Z-
dc.date.issued2005-
dc.identifier.citationZhongguo Jixie Gongcheng/China Mechanical Engineering, 2005, v. 16, n. SUPPL., p. 202-204-
dc.identifier.issn1004-132X-
dc.identifier.urihttp://hdl.handle.net/10722/265763-
dc.description.abstractThrough analyzing the operating principles of the micro thermal sensor, associating with thin film resistor and the substrate, we got TCR of the resistor, and analyzed the method of calculation and measurement of the TCR and the resistively of MEMS thermal sensor. Then, we investigated the effectiveness of the resistor special dimension on the sensor performance. At last, we presented the design basis of the micro thermal sensor film material, the substrate, the dimension and the TCR of the thin film resistor, so we can offer references to thermal sensor's thin film resistor design and performance analysis.-
dc.languageeng-
dc.relation.ispartofZhongguo Jixie Gongcheng/China Mechanical Engineering-
dc.subjectThermal device-
dc.subjectMicro sensor-
dc.subjectFilm resistor-
dc.subjectTCR-
dc.titleDesign investigation on micro thermal sensor film resistor-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-23744505799-
dc.identifier.volume16-
dc.identifier.issueSUPPL.-
dc.identifier.spage202-
dc.identifier.epage204-

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