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Article: Polymeric micromechanical components with tunable stiffness

TitlePolymeric micromechanical components with tunable stiffness
Authors
Issue Date2001
PublisherAIP Publishing LLC.
Citation
Applied Physics Letters, 2001, v. 79 n. 11, p. 1700 How to Cite?
AbstractWe present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.
Persistent Identifierhttp://hdl.handle.net/10722/262577
ISSN
2017 Impact Factor: 3.495
2015 SCImago Journal Rankings: 1.105
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorManias, E-
dc.contributor.authorChen, J-
dc.contributor.authorFang, N-
dc.contributor.authorZhang, X-
dc.date.accessioned2018-10-02T07:24:19Z-
dc.date.available2018-10-02T07:24:19Z-
dc.date.issued2001-
dc.identifier.citationApplied Physics Letters, 2001, v. 79 n. 11, p. 1700-
dc.identifier.issn0003-6951-
dc.identifier.urihttp://hdl.handle.net/10722/262577-
dc.description.abstractWe present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.-
dc.languageeng-
dc.publisherAIP Publishing LLC.-
dc.relation.ispartofApplied Physics Letters-
dc.titlePolymeric micromechanical components with tunable stiffness-
dc.typeArticle-
dc.identifier.emailZhang, X: president@hku.hk-
dc.identifier.authorityZhang, X=rp02411-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1063/1.1400084-
dc.identifier.volume79-
dc.identifier.issue11-
dc.identifier.spage1700-
dc.identifier.epage1700-
dc.identifier.isiWOS:000170800700039-
dc.publisher.placeUnited States-

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