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Article: Microstereolithography of lead zirconate titanate thick film on silicon substrate

TitleMicrostereolithography of lead zirconate titanate thick film on silicon substrate
Authors
Issue Date2000
Citation
Sensors and Actuators, A: Physical, 2000, v. 87, n. 1-2, p. 72-77 How to Cite?
AbstractThe microstereolithography (μSL) of lead zirconate titanate (PZT) thick films on platinum-buffered silicon substrates is reported for the first time in this paper. Crack-free PZT thick films (80-130 μm thick) have been fabricated by laser direct-write UV polymerization from the HDDA-based UV curable PZT suspensions. The characterization of the fired films shows dielectric permittivities of 120-200, tangent loss of 0.92-2.5% and remnant polarization of 0.9-1.7 μC/cm2. The field-induced longitudinal piezoelectric coefficient (d33) of an 84-μm thick film is 100 pC/N and the piezoelectric voltage coefficient (g33) is about 59.5 × 10-3V m/N. These results demonstrated the potential for μSL of advanced piezoelectric microsensors and microactuators.
Persistent Identifierhttp://hdl.handle.net/10722/256868
ISSN
2015 Impact Factor: 2.201
2015 SCImago Journal Rankings: 0.902

 

DC FieldValueLanguage
dc.contributor.authorJiang, X. N.-
dc.contributor.authorSun, C.-
dc.contributor.authorZhang, X.-
dc.contributor.authorXu, B.-
dc.contributor.authorYe, Y. H.-
dc.date.accessioned2018-07-24T08:58:09Z-
dc.date.available2018-07-24T08:58:09Z-
dc.date.issued2000-
dc.identifier.citationSensors and Actuators, A: Physical, 2000, v. 87, n. 1-2, p. 72-77-
dc.identifier.issn0924-4247-
dc.identifier.urihttp://hdl.handle.net/10722/256868-
dc.description.abstractThe microstereolithography (μSL) of lead zirconate titanate (PZT) thick films on platinum-buffered silicon substrates is reported for the first time in this paper. Crack-free PZT thick films (80-130 μm thick) have been fabricated by laser direct-write UV polymerization from the HDDA-based UV curable PZT suspensions. The characterization of the fired films shows dielectric permittivities of 120-200, tangent loss of 0.92-2.5% and remnant polarization of 0.9-1.7 μC/cm2. The field-induced longitudinal piezoelectric coefficient (d33) of an 84-μm thick film is 100 pC/N and the piezoelectric voltage coefficient (g33) is about 59.5 × 10-3V m/N. These results demonstrated the potential for μSL of advanced piezoelectric microsensors and microactuators.-
dc.languageeng-
dc.relation.ispartofSensors and Actuators, A: Physical-
dc.titleMicrostereolithography of lead zirconate titanate thick film on silicon substrate-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1016/S0924-4247(00)00467-2-
dc.identifier.scopuseid_2-s2.0-0034508234-
dc.identifier.volume87-
dc.identifier.issue1-2-
dc.identifier.spage72-
dc.identifier.epage77-

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