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Article: Micro-stereolithography of polymeric and ceramic microstructures

TitleMicro-stereolithography of polymeric and ceramic microstructures
Authors
Issue Date1999
Citation
Sensors and Actuators, A: Physical, 1999, v. 77, n. 2, p. 149-156 How to Cite?
AbstractMicro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar+laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, μSL of ceramic microgears has been successfully demonstrated.
Persistent Identifierhttp://hdl.handle.net/10722/256865
ISSN
2015 Impact Factor: 2.201
2015 SCImago Journal Rankings: 0.902

 

DC FieldValueLanguage
dc.contributor.authorZhang, X.-
dc.contributor.authorJiang, X. N.-
dc.contributor.authorSun, C.-
dc.date.accessioned2018-07-24T08:58:09Z-
dc.date.available2018-07-24T08:58:09Z-
dc.date.issued1999-
dc.identifier.citationSensors and Actuators, A: Physical, 1999, v. 77, n. 2, p. 149-156-
dc.identifier.issn0924-4247-
dc.identifier.urihttp://hdl.handle.net/10722/256865-
dc.description.abstractMicro-stereolithography (μSL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced μSL apparatus is designed and developed which includes an Ar+laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 μm resolution of μSL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, μSL of ceramic microgears has been successfully demonstrated.-
dc.languageeng-
dc.relation.ispartofSensors and Actuators, A: Physical-
dc.titleMicro-stereolithography of polymeric and ceramic microstructures-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1016/S0924-4247(99)00189-2-
dc.identifier.scopuseid_2-s2.0-0033344838-
dc.identifier.volume77-
dc.identifier.issue2-
dc.identifier.spage149-
dc.identifier.epage156-

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