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Article: Research on sub-μN micro-force sensor based on PVDF
Title | Research on sub-μN micro-force sensor based on PVDF |
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Authors | |
Keywords | PVDF Sensor Micro-force sensing Microassembly |
Issue Date | 2008 |
Citation | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2008, v. 29, n. SUPPL. 2, p. 273-278 How to Cite? |
Abstract | A novel micro-force sensor that can reliably measure force in the range of sub-micro-Newton (μN) and its calibration method are designed in this paper. Reliable and sensitive micro-force sensing and corresponding control method is quite important to improve the efficiency of microassembly. At present, sub-μN micro-force in microassembly is not able to be reliably measured by the existing force sensors. In this paper, the polyvinylidene fluoride (PVDF) is used to fabricate a highly sensitive force sensor. The relationship model of micro-force and the sensor's output voltage is built up, and corresponding signal processing circuit is designed and realized. Furthermore, the relationship model is calibrated. Experiment results show the sub-μN sensitivity of the sensor. The results also verify the accuracy of the sensor's relationship model, the effectiveness of the signal processing method and calibration method. The micro-force sensor developed in this paper provides a feasible and versatile solution in micro-force sensing and feedback control for micro/nano assembly and manipulation, and will promote the technology of automating the micro/nano assembly and manipulation. |
Persistent Identifier | http://hdl.handle.net/10722/213037 |
ISSN | 2023 SCImago Journal Rankings: 0.281 |
DC Field | Value | Language |
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dc.contributor.author | Liu, Yiyang | - |
dc.contributor.author | Wang, Yuechao | - |
dc.contributor.author | Yu, Peng | - |
dc.contributor.author | Xi, Ning | - |
dc.contributor.author | Dong, Zaili | - |
dc.date.accessioned | 2015-07-28T04:05:51Z | - |
dc.date.available | 2015-07-28T04:05:51Z | - |
dc.date.issued | 2008 | - |
dc.identifier.citation | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2008, v. 29, n. SUPPL. 2, p. 273-278 | - |
dc.identifier.issn | 0254-3087 | - |
dc.identifier.uri | http://hdl.handle.net/10722/213037 | - |
dc.description.abstract | A novel micro-force sensor that can reliably measure force in the range of sub-micro-Newton (μN) and its calibration method are designed in this paper. Reliable and sensitive micro-force sensing and corresponding control method is quite important to improve the efficiency of microassembly. At present, sub-μN micro-force in microassembly is not able to be reliably measured by the existing force sensors. In this paper, the polyvinylidene fluoride (PVDF) is used to fabricate a highly sensitive force sensor. The relationship model of micro-force and the sensor's output voltage is built up, and corresponding signal processing circuit is designed and realized. Furthermore, the relationship model is calibrated. Experiment results show the sub-μN sensitivity of the sensor. The results also verify the accuracy of the sensor's relationship model, the effectiveness of the signal processing method and calibration method. The micro-force sensor developed in this paper provides a feasible and versatile solution in micro-force sensing and feedback control for micro/nano assembly and manipulation, and will promote the technology of automating the micro/nano assembly and manipulation. | - |
dc.language | eng | - |
dc.relation.ispartof | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | - |
dc.subject | PVDF | - |
dc.subject | Sensor | - |
dc.subject | Micro-force sensing | - |
dc.subject | Microassembly | - |
dc.title | Research on sub-μN micro-force sensor based on PVDF | - |
dc.type | Article | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.scopus | eid_2-s2.0-59549103856 | - |
dc.identifier.volume | 29 | - |
dc.identifier.issue | SUPPL. 2 | - |
dc.identifier.spage | 273 | - |
dc.identifier.epage | 278 | - |
dc.identifier.issnl | 0254-3087 | - |