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Article: Research on sub-μN micro-force sensor based on PVDF

TitleResearch on sub-μN micro-force sensor based on PVDF
Authors
KeywordsPVDF
Sensor
Micro-force sensing
Microassembly
Issue Date2008
Citation
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2008, v. 29, n. SUPPL. 2, p. 273-278 How to Cite?
AbstractA novel micro-force sensor that can reliably measure force in the range of sub-micro-Newton (μN) and its calibration method are designed in this paper. Reliable and sensitive micro-force sensing and corresponding control method is quite important to improve the efficiency of microassembly. At present, sub-μN micro-force in microassembly is not able to be reliably measured by the existing force sensors. In this paper, the polyvinylidene fluoride (PVDF) is used to fabricate a highly sensitive force sensor. The relationship model of micro-force and the sensor's output voltage is built up, and corresponding signal processing circuit is designed and realized. Furthermore, the relationship model is calibrated. Experiment results show the sub-μN sensitivity of the sensor. The results also verify the accuracy of the sensor's relationship model, the effectiveness of the signal processing method and calibration method. The micro-force sensor developed in this paper provides a feasible and versatile solution in micro-force sensing and feedback control for micro/nano assembly and manipulation, and will promote the technology of automating the micro/nano assembly and manipulation.
Persistent Identifierhttp://hdl.handle.net/10722/213037
ISSN
2015 SCImago Journal Rankings: 0.322

 

DC FieldValueLanguage
dc.contributor.authorLiu, Yiyang-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorYu, Peng-
dc.contributor.authorXi, Ning-
dc.contributor.authorDong, Zaili-
dc.date.accessioned2015-07-28T04:05:51Z-
dc.date.available2015-07-28T04:05:51Z-
dc.date.issued2008-
dc.identifier.citationYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2008, v. 29, n. SUPPL. 2, p. 273-278-
dc.identifier.issn0254-3087-
dc.identifier.urihttp://hdl.handle.net/10722/213037-
dc.description.abstractA novel micro-force sensor that can reliably measure force in the range of sub-micro-Newton (μN) and its calibration method are designed in this paper. Reliable and sensitive micro-force sensing and corresponding control method is quite important to improve the efficiency of microassembly. At present, sub-μN micro-force in microassembly is not able to be reliably measured by the existing force sensors. In this paper, the polyvinylidene fluoride (PVDF) is used to fabricate a highly sensitive force sensor. The relationship model of micro-force and the sensor's output voltage is built up, and corresponding signal processing circuit is designed and realized. Furthermore, the relationship model is calibrated. Experiment results show the sub-μN sensitivity of the sensor. The results also verify the accuracy of the sensor's relationship model, the effectiveness of the signal processing method and calibration method. The micro-force sensor developed in this paper provides a feasible and versatile solution in micro-force sensing and feedback control for micro/nano assembly and manipulation, and will promote the technology of automating the micro/nano assembly and manipulation.-
dc.languageeng-
dc.relation.ispartofYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument-
dc.subjectPVDF-
dc.subjectSensor-
dc.subjectMicro-force sensing-
dc.subjectMicroassembly-
dc.titleResearch on sub-μN micro-force sensor based on PVDF-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-59549103856-
dc.identifier.volume29-
dc.identifier.issueSUPPL. 2-
dc.identifier.spage273-
dc.identifier.epage278-

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