Research on signal processing method and calibration method of sub-μN micro-force sensor

Abstract

To develop a novel micro-force sensor that can reliably measure force in the range of sub-micro-Newton (μN), the signal processing method and a novel indirect calibration method are designed and realized in this paper. The relationship model between the micro-force acting on the sensor's probe tip and the deflection of the probe tip is built up. With the above model and the standard deflection input, the novel indirect calibration method completes calibrating the relationship model between the micro-force and the output voltage of the sensor and solves the problem that standard micro-force used in calibration is difficult to find. Experiment results show the signal processing method and the new indirect calibration method are effective and correct. The signal processing method and the indirect calibration method are indispensable to developing the sub-μN micro-force sensor and providing a feasible and versatile solution in micro contact-force sensing and feedback control for micro/nano assembly and manipulation.