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Article: Study on modeling and real-time display of AFM based robotic nano-imprint

TitleStudy on modeling and real-time display of AFM based robotic nano-imprint
Authors
KeywordsNano-scotch size model
Atomic force microscope
Robotic nano-patterning
Real-time display
Issue Date2007
Citation
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2007, v. 28, n. SUPPL. 3, p. 37-40 How to Cite?
AbstractNano-imprint based on AFM probe may be used in fabrication or repair of MEMS mask pattern. In this research, we propose a nano-scotch size model of plastic material, based on which the scotch's position and size can be obtained according to probe's position and applied force, and then displayed on the visual interface according to virtual-reality (VR) technology. Based on real-time display of nano-imprint process, the operator can elementarily control the imprint process and eventual result, and nano-imprint on polycarbonate verifies the effectiveness of the proposed model.
Persistent Identifierhttp://hdl.handle.net/10722/212956
ISSN
2015 SCImago Journal Rankings: 0.322

 

DC FieldValueLanguage
dc.contributor.authorTian, Xiaojun-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorXi, Ning-
dc.contributor.authorDong, Zaili-
dc.date.accessioned2015-07-28T04:05:34Z-
dc.date.available2015-07-28T04:05:34Z-
dc.date.issued2007-
dc.identifier.citationYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2007, v. 28, n. SUPPL. 3, p. 37-40-
dc.identifier.issn0254-3087-
dc.identifier.urihttp://hdl.handle.net/10722/212956-
dc.description.abstractNano-imprint based on AFM probe may be used in fabrication or repair of MEMS mask pattern. In this research, we propose a nano-scotch size model of plastic material, based on which the scotch's position and size can be obtained according to probe's position and applied force, and then displayed on the visual interface according to virtual-reality (VR) technology. Based on real-time display of nano-imprint process, the operator can elementarily control the imprint process and eventual result, and nano-imprint on polycarbonate verifies the effectiveness of the proposed model.-
dc.languageeng-
dc.relation.ispartofYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument-
dc.subjectNano-scotch size model-
dc.subjectAtomic force microscope-
dc.subjectRobotic nano-patterning-
dc.subjectReal-time display-
dc.titleStudy on modeling and real-time display of AFM based robotic nano-imprint-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-39749161439-
dc.identifier.volume28-
dc.identifier.issueSUPPL. 3-
dc.identifier.spage37-
dc.identifier.epage40-

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