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Article: Development of atomic force microscope based on nano positioning stage

TitleDevelopment of atomic force microscope based on nano positioning stage
Authors
KeywordsAFM force curve
Kinematic coupling
Nano positioning stage
AFM
Issue Date2007
Citation
Gaojishu Tongxin/Chinese High Technology Letters, 2007, v. 17, n. 3, p. 268-273 How to Cite?
AbstractIn this article, a new atomic force microscope (AFM) with a nano positioning stage as its scanner is described. The stage has three piezoelectric actuators and can move in three directions with high accuracy without kinematic coupling. Thus in the new AFM, two kinds of structure errors-vertical cross coupling error and scanning size error which affect the precision of nano-observation and nanomanipulation due to the kinematic coupling of single tube during its bending scan motion are removed effectively, and the precision of nano-observation and nanomanipulation is improved greatly.
Persistent Identifierhttp://hdl.handle.net/10722/212916
ISSN
2015 SCImago Journal Rankings: 0.107

 

DC FieldValueLanguage
dc.contributor.authorJiao, Niandong-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorXi, Ning-
dc.contributor.authorDong, Zaili-
dc.date.accessioned2015-07-28T04:05:26Z-
dc.date.available2015-07-28T04:05:26Z-
dc.date.issued2007-
dc.identifier.citationGaojishu Tongxin/Chinese High Technology Letters, 2007, v. 17, n. 3, p. 268-273-
dc.identifier.issn1002-0470-
dc.identifier.urihttp://hdl.handle.net/10722/212916-
dc.description.abstractIn this article, a new atomic force microscope (AFM) with a nano positioning stage as its scanner is described. The stage has three piezoelectric actuators and can move in three directions with high accuracy without kinematic coupling. Thus in the new AFM, two kinds of structure errors-vertical cross coupling error and scanning size error which affect the precision of nano-observation and nanomanipulation due to the kinematic coupling of single tube during its bending scan motion are removed effectively, and the precision of nano-observation and nanomanipulation is improved greatly.-
dc.languageeng-
dc.relation.ispartofGaojishu Tongxin/Chinese High Technology Letters-
dc.subjectAFM force curve-
dc.subjectKinematic coupling-
dc.subjectNano positioning stage-
dc.subjectAFM-
dc.titleDevelopment of atomic force microscope based on nano positioning stage-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-34247233136-
dc.identifier.volume17-
dc.identifier.issue3-
dc.identifier.spage268-
dc.identifier.epage273-

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