File Download
There are no files associated with this item.
Supplementary
-
Citations:
- Scopus: 0
- Appears in Collections:
Article: Development of atomic force microscope based on nano positioning stage
| Title | Development of atomic force microscope based on nano positioning stage |
|---|---|
| Authors | |
| Keywords | AFM force curve Kinematic coupling Nano positioning stage AFM |
| Issue Date | 2007 |
| Citation | Gaojishu Tongxin/Chinese High Technology Letters, 2007, v. 17, n. 3, p. 268-273 How to Cite? |
| Abstract | In this article, a new atomic force microscope (AFM) with a nano positioning stage as its scanner is described. The stage has three piezoelectric actuators and can move in three directions with high accuracy without kinematic coupling. Thus in the new AFM, two kinds of structure errors-vertical cross coupling error and scanning size error which affect the precision of nano-observation and nanomanipulation due to the kinematic coupling of single tube during its bending scan motion are removed effectively, and the precision of nano-observation and nanomanipulation is improved greatly. |
| Persistent Identifier | http://hdl.handle.net/10722/212916 |
| ISSN | 2023 SCImago Journal Rankings: 0.127 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jiao, Niandong | - |
| dc.contributor.author | Wang, Yuechao | - |
| dc.contributor.author | Xi, Ning | - |
| dc.contributor.author | Dong, Zaili | - |
| dc.date.accessioned | 2015-07-28T04:05:26Z | - |
| dc.date.available | 2015-07-28T04:05:26Z | - |
| dc.date.issued | 2007 | - |
| dc.identifier.citation | Gaojishu Tongxin/Chinese High Technology Letters, 2007, v. 17, n. 3, p. 268-273 | - |
| dc.identifier.issn | 1002-0470 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/212916 | - |
| dc.description.abstract | In this article, a new atomic force microscope (AFM) with a nano positioning stage as its scanner is described. The stage has three piezoelectric actuators and can move in three directions with high accuracy without kinematic coupling. Thus in the new AFM, two kinds of structure errors-vertical cross coupling error and scanning size error which affect the precision of nano-observation and nanomanipulation due to the kinematic coupling of single tube during its bending scan motion are removed effectively, and the precision of nano-observation and nanomanipulation is improved greatly. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Gaojishu Tongxin/Chinese High Technology Letters | - |
| dc.subject | AFM force curve | - |
| dc.subject | Kinematic coupling | - |
| dc.subject | Nano positioning stage | - |
| dc.subject | AFM | - |
| dc.title | Development of atomic force microscope based on nano positioning stage | - |
| dc.type | Article | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.scopus | eid_2-s2.0-34247233136 | - |
| dc.identifier.volume | 17 | - |
| dc.identifier.issue | 3 | - |
| dc.identifier.spage | 268 | - |
| dc.identifier.epage | 273 | - |
| dc.identifier.issnl | 1002-0470 | - |