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Article: AFM based nanomanipulation system with 3D force feedback

TitleAFM based nanomanipulation system with 3D force feedback
Authors
KeywordsAtomic force microscope (AFM)
Three dimensional (3D) nano forces
Nanomanipulation
Issue Date2006
Citation
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2006, v. 27, n. 7, p. 661-665 How to Cite?
AbstractDue to the lack of real-time sensory information feedback during atomic force microscope (AFM) based nanomanipulation, the manipulation is performed with low efficiency and less flexibility, and AFM probe is also prone to break. To solve this problem, the model of nano forces acting on probe and cantilever deflection was proposed. The real-time three dimensional (3D) nano forces are obtained from cantilever deflections measured by position sensing detector (PSD) using new parameter calibration method. The 3D nano forces are magnified proportionally and sent to a haptic/force device for operator to feel, then the operator can adjust the forces acting on the probe and probe motion trajectory in real time. Thus the efficiency and flexibility of nanomanipulation can be significantly improved and the probe can be protected from being broken. The nanolithography and MWCNT pushing experiments have verified the effectiveness of the system.
Persistent Identifierhttp://hdl.handle.net/10722/212880
ISSN
2015 SCImago Journal Rankings: 0.322

 

DC FieldValueLanguage
dc.contributor.authorTian, Xiaojun-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorLiu, Lianqing-
dc.contributor.authorJiao, Niandong-
dc.contributor.authorDong, Zaili-
dc.contributor.authorXi, Ning-
dc.date.accessioned2015-07-28T04:05:18Z-
dc.date.available2015-07-28T04:05:18Z-
dc.date.issued2006-
dc.identifier.citationYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2006, v. 27, n. 7, p. 661-665-
dc.identifier.issn0254-3087-
dc.identifier.urihttp://hdl.handle.net/10722/212880-
dc.description.abstractDue to the lack of real-time sensory information feedback during atomic force microscope (AFM) based nanomanipulation, the manipulation is performed with low efficiency and less flexibility, and AFM probe is also prone to break. To solve this problem, the model of nano forces acting on probe and cantilever deflection was proposed. The real-time three dimensional (3D) nano forces are obtained from cantilever deflections measured by position sensing detector (PSD) using new parameter calibration method. The 3D nano forces are magnified proportionally and sent to a haptic/force device for operator to feel, then the operator can adjust the forces acting on the probe and probe motion trajectory in real time. Thus the efficiency and flexibility of nanomanipulation can be significantly improved and the probe can be protected from being broken. The nanolithography and MWCNT pushing experiments have verified the effectiveness of the system.-
dc.languageeng-
dc.relation.ispartofYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument-
dc.subjectAtomic force microscope (AFM)-
dc.subjectThree dimensional (3D) nano forces-
dc.subjectNanomanipulation-
dc.titleAFM based nanomanipulation system with 3D force feedback-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-33748936321-
dc.identifier.volume27-
dc.identifier.issue7-
dc.identifier.spage661-
dc.identifier.epage665-

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