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Article: Kinematics modeling and error analysis of AFM tube scanner

TitleKinematics modeling and error analysis of AFM tube scanner
Authors
KeywordsScanning size error
Tube scanner
Sample-scanning
Kinematics model
Gross-coupling
AFM
Issue Date2005
Citation
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2005, v. 26, n. 9, p. 928-933 How to Cite?
AbstractFor sample-scanning atomic force microscope (AFM), the kinematics of tube scanner-sample-probe system is analyzed and the kinematics model is proposed. The model shows that transverse and longitudinal displacement at the point on sample touched by probe tip is dependent on probe tip offset to scanner axes, applied voltage or nominal scanning size and sample thickness. According to the model, two important errors caused by bow motion are quantitatively analyzed, which demonstrates scanning size error greatly affected by sample thickness and nominal scanning size, while Z axis cross-coupling error greatly affected by probe tip offset and nominal scanning size. Experiments verify the kinematics model and error calculation formulas. In addition, some methods are presented to minimize the errors.
Persistent Identifierhttp://hdl.handle.net/10722/212827
ISSN
2015 SCImago Journal Rankings: 0.322

 

DC FieldValueLanguage
dc.contributor.authorTian, Xiaojun-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorDong, Zaili-
dc.contributor.authorXi, Ning-
dc.date.accessioned2015-07-28T04:05:08Z-
dc.date.available2015-07-28T04:05:08Z-
dc.date.issued2005-
dc.identifier.citationYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2005, v. 26, n. 9, p. 928-933-
dc.identifier.issn0254-3087-
dc.identifier.urihttp://hdl.handle.net/10722/212827-
dc.description.abstractFor sample-scanning atomic force microscope (AFM), the kinematics of tube scanner-sample-probe system is analyzed and the kinematics model is proposed. The model shows that transverse and longitudinal displacement at the point on sample touched by probe tip is dependent on probe tip offset to scanner axes, applied voltage or nominal scanning size and sample thickness. According to the model, two important errors caused by bow motion are quantitatively analyzed, which demonstrates scanning size error greatly affected by sample thickness and nominal scanning size, while Z axis cross-coupling error greatly affected by probe tip offset and nominal scanning size. Experiments verify the kinematics model and error calculation formulas. In addition, some methods are presented to minimize the errors.-
dc.languageeng-
dc.relation.ispartofYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument-
dc.subjectScanning size error-
dc.subjectTube scanner-
dc.subjectSample-scanning-
dc.subjectKinematics model-
dc.subjectGross-coupling-
dc.subjectAFM-
dc.titleKinematics modeling and error analysis of AFM tube scanner-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-25844462362-
dc.identifier.volume26-
dc.identifier.issue9-
dc.identifier.spage928-
dc.identifier.epage933-

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