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Article: Chemical composition study of high-K La-silicate gate stacks at sub-nanometer scale

TitleChemical composition study of high-K La-silicate gate stacks at sub-nanometer scale
Authors
Issue Date2014
Citation
Physica Status Solidi A, 2014, p. 201431143 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/200665

 

DC FieldValueLanguage
dc.contributor.authorLiu, Fen_US
dc.contributor.authorYANG, Gen_US
dc.contributor.authorDuscher, Gen_US
dc.date.accessioned2014-08-21T06:54:17Z-
dc.date.available2014-08-21T06:54:17Z-
dc.date.issued2014en_US
dc.identifier.citationPhysica Status Solidi A, 2014, p. 201431143en_US
dc.identifier.urihttp://hdl.handle.net/10722/200665-
dc.languageengen_US
dc.relation.ispartofPhysica Status Solidi Aen_US
dc.titleChemical composition study of high-K La-silicate gate stacks at sub-nanometer scaleen_US
dc.typeArticleen_US
dc.identifier.emailLiu, F: fordliu@hku.hken_US
dc.identifier.authorityLiu, F=rp01358en_US
dc.identifier.hkuros234294en_US
dc.identifier.spage201431143en_US
dc.identifier.epage201431143en_US

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