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Article: Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography

TitleCascadic multigrid algorithm for robust inverse mask synthesis in optical lithography
Authors
Issue Date2014
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x865.xml
Citation
Journal of Micro/Nanolithography, MEMS, and MOEMS, 2014, v. 13 n. 2, p. 023003-1-023003-10 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/200618
ISSN
2015 Impact Factor: 1.335
2015 SCImago Journal Rankings: 0.409
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorLv, Wen_US
dc.contributor.authorLam, EYMen_US
dc.contributor.authorWei, Hen_US
dc.contributor.authorLiu, Sen_US
dc.date.accessioned2014-08-21T06:52:41Z-
dc.date.available2014-08-21T06:52:41Z-
dc.date.issued2014en_US
dc.identifier.citationJournal of Micro/Nanolithography, MEMS, and MOEMS, 2014, v. 13 n. 2, p. 023003-1-023003-10en_US
dc.identifier.issn1932-5150-
dc.identifier.urihttp://hdl.handle.net/10722/200618-
dc.languageengen_US
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x865.xml-
dc.relation.ispartofJournal of Micro/Nanolithography, MEMS, and MOEMSen_US
dc.rightsJournal of Micro/Nanolithography, MEMS, and MOEMS. Copyright © S P I E - International Society for Optical Engineering.-
dc.rightsCopyright notice format: Copyright 2014 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.-
dc.rightsCreative Commons: Attribution 3.0 Hong Kong License-
dc.titleCascadic multigrid algorithm for robust inverse mask synthesis in optical lithographyen_US
dc.typeArticleen_US
dc.identifier.emailLv, W: wenlv@hku.hken_US
dc.identifier.emailLam, EYM: elam@eee.hku.hken_US
dc.identifier.authorityLam, EYM=rp00131en_US
dc.description.naturepublished_or_final_version-
dc.identifier.doi10.1117/1.JMM.13.2.023003-
dc.identifier.scopuseid_2-s2.0-84901265181-
dc.identifier.hkuros233665en_US
dc.identifier.volume13-
dc.identifier.issue2-
dc.identifier.spage023003-
dc.identifier.epage1-
dc.identifier.isiWOS:000338635800005-
dc.publisher.placeUnited States-

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