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Conference Paper: Zn-doped Zr oxynitride as charge-trapping layer for flash memory applications

TitleZn-doped Zr oxynitride as charge-trapping layer for flash memory applications
Authors
Issue Date2013
PublisherIEEE. The Journal's web site is located at http://ieeexplore.ieee.org/xpl/conhome.jsp?punumber=1000853
Citation
The 2013 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC), Hong Kong, 3-5 June 2013. In Conference Proceedings, 2013, p. 1-2 How to Cite?
AbstractIn this work, we proposed Zn-doped Zr oxynitride (ZrZnON) as a new charge-trapping layer for flash memory applications and investigated its memory characteristics based on the capacitor structure of Al/Al2O3/ZrZnON/SiO2/Si. The high-K dielectric film, ZrON, was used as the control group. The effects of incorporating ZnO in ZrON were studied by comparing the differences of memory properties between the two charge-trapping layers. Measured data showed that the memory device containing ZrZnON had much larger C-V hysteresis window, higher programming/erasing speeds and much better charge retention properties than the one containing ZrON. These improvements should result from charge traps created by ZnO incorporation and deeper quantum wells built by the band-gap alignment of ZrZnON to the Si02 tunnel layer and Al2O3 blocking layer.
Persistent Identifierhttp://hdl.handle.net/10722/191664
ISBN

 

DC FieldValueLanguage
dc.contributor.authorTao, Qen_US
dc.contributor.authorLai, PTen_US
dc.date.accessioned2013-10-15T07:14:58Z-
dc.date.available2013-10-15T07:14:58Z-
dc.date.issued2013en_US
dc.identifier.citationThe 2013 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC), Hong Kong, 3-5 June 2013. In Conference Proceedings, 2013, p. 1-2en_US
dc.identifier.isbn978-1-4673-2523-3-
dc.identifier.urihttp://hdl.handle.net/10722/191664-
dc.description.abstractIn this work, we proposed Zn-doped Zr oxynitride (ZrZnON) as a new charge-trapping layer for flash memory applications and investigated its memory characteristics based on the capacitor structure of Al/Al2O3/ZrZnON/SiO2/Si. The high-K dielectric film, ZrON, was used as the control group. The effects of incorporating ZnO in ZrON were studied by comparing the differences of memory properties between the two charge-trapping layers. Measured data showed that the memory device containing ZrZnON had much larger C-V hysteresis window, higher programming/erasing speeds and much better charge retention properties than the one containing ZrON. These improvements should result from charge traps created by ZnO incorporation and deeper quantum wells built by the band-gap alignment of ZrZnON to the Si02 tunnel layer and Al2O3 blocking layer.-
dc.languageengen_US
dc.publisherIEEE. The Journal's web site is located at http://ieeexplore.ieee.org/xpl/conhome.jsp?punumber=1000853-
dc.relation.ispartofIEEE Conference on Electron Devices and Solid-State Circuits Proceedingsen_US
dc.rightsIEEE Conference on Electron Devices and Solid-State Circuits Proceedings. Copyright © IEEE.-
dc.rights©2013 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.-
dc.rightsCreative Commons: Attribution 3.0 Hong Kong License-
dc.titleZn-doped Zr oxynitride as charge-trapping layer for flash memory applicationsen_US
dc.typeConference_Paperen_US
dc.identifier.emailLai, PT: laip@eee.hku.hken_US
dc.identifier.authorityLai, PT=rp00130en_US
dc.description.naturepublished_or_final_version-
dc.identifier.hkuros226083en_US
dc.identifier.spage1-
dc.identifier.epage2-
dc.publisher.placeUnited Statesen_US
dc.customcontrol.immutablesml 131108-

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