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Conference Paper: Efficient source mask optimization with Zernike polynomial function-based source representation
| Title | Efficient source mask optimization with Zernike polynomial function-based source representation |
|---|---|
| Authors | |
| Issue Date | 2013 |
| Publisher | The Optical Society (OSA). |
| Citation | The 6th International Photonics and OptoElectronics Meetings (POEM), Wuhan, China, 24-27 May 2013, p. abstract no. NSa3A.15 How to Cite? |
| Abstract | This paper introduces a Zernike polynomial function-based source representation method for the aerial image calculation of optical lithography. It is shown that this
representation enables computation reduction for both mask optimization and source optimization. |
| Description | Meeting: Nanophotonics, Nanoelectronics and Nanosensor (N3) Poster Session |
| Persistent Identifier | http://hdl.handle.net/10722/186797 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Wu, X | en_US |
| dc.contributor.author | Liu, S | en_US |
| dc.contributor.author | Li, J | en_US |
| dc.contributor.author | Lam, EYM | en_US |
| dc.date.accessioned | 2013-08-20T12:19:33Z | - |
| dc.date.available | 2013-08-20T12:19:33Z | - |
| dc.date.issued | 2013 | en_US |
| dc.identifier.citation | The 6th International Photonics and OptoElectronics Meetings (POEM), Wuhan, China, 24-27 May 2013, p. abstract no. NSa3A.15 | en_US |
| dc.identifier.uri | http://hdl.handle.net/10722/186797 | - |
| dc.description | Meeting: Nanophotonics, Nanoelectronics and Nanosensor (N3) | - |
| dc.description | Poster Session | - |
| dc.description.abstract | This paper introduces a Zernike polynomial function-based source representation method for the aerial image calculation of optical lithography. It is shown that this representation enables computation reduction for both mask optimization and source optimization. | - |
| dc.language | eng | en_US |
| dc.publisher | The Optical Society (OSA). | - |
| dc.relation.ispartof | International Photonics and OptoElectronics Meetings (POEM) | en_US |
| dc.title | Efficient source mask optimization with Zernike polynomial function-based source representation | en_US |
| dc.type | Conference_Paper | en_US |
| dc.identifier.email | Lam, EYM: elam@eee.hku.hk | en_US |
| dc.identifier.authority | Lam, EYM=rp00131 | en_US |
| dc.identifier.hkuros | 220503 | en_US |
| dc.identifier.spage | abstract no. NSa3A.15 | - |
| dc.identifier.epage | abstract no. NSa3A.15 | - |
| dc.publisher.place | United States | - |