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Conference Paper: Fast Aerial Image Simulation of Partially Coherent Illumination System for Source Mask Optimization
Title | Fast Aerial Image Simulation of Partially Coherent Illumination System for Source Mask Optimization |
---|---|
Authors | |
Issue Date | 2013 |
Publisher | The Optical Society (OSA). |
Citation | The 7th International Conference on Nanophotonics (ICNP) and the 3rd Conference on Advances in Optoelectronics and Micro/Nano Optics (AOM), Hong Kong, China, 19-23 May 2013, p. abstract no. P-NF009 How to Cite? |
Description | Poster session |
Persistent Identifier | http://hdl.handle.net/10722/186796 |
DC Field | Value | Language |
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dc.contributor.author | Wu, X | en_US |
dc.contributor.author | Lam, EYM | en_US |
dc.contributor.author | Liu, S | en_US |
dc.date.accessioned | 2013-08-20T12:19:32Z | - |
dc.date.available | 2013-08-20T12:19:32Z | - |
dc.date.issued | 2013 | en_US |
dc.identifier.citation | The 7th International Conference on Nanophotonics (ICNP) and the 3rd Conference on Advances in Optoelectronics and Micro/Nano Optics (AOM), Hong Kong, China, 19-23 May 2013, p. abstract no. P-NF009 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/186796 | - |
dc.description | Poster session | - |
dc.language | eng | en_US |
dc.publisher | The Optical Society (OSA). | - |
dc.relation.ispartof | International COnference on Nanophotonics (ICNP) and Conference on Advances in Optoelectronics and Micro/Nano Optics (AOM) | en_US |
dc.title | Fast Aerial Image Simulation of Partially Coherent Illumination System for Source Mask Optimization | en_US |
dc.type | Conference_Paper | en_US |
dc.identifier.email | Lam, EYM: elam@eee.hku.hk | en_US |
dc.identifier.authority | Lam, EYM=rp00131 | en_US |
dc.identifier.hkuros | 220502 | en_US |
dc.identifier.spage | abstract no. P-NF009 | - |
dc.identifier.epage | abstract no. P-NF009 | - |
dc.publisher.place | United States | - |