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Conference Paper: An elliptic phase-shifting algorithm for high speed three-dimensional profilometry

TitleAn elliptic phase-shifting algorithm for high speed three-dimensional profilometry
Authors
Issue Date2013
PublisherSociety of Photo-Optical Instrumentation Engineers (SPIE). The Journal's web site is located at http://www.spie.org/app/Publications/index.cfm?fuseaction=proceedings
Citation
Conference 8661 - Image Processing: Machine Vision Applications VI, Burlingame, CA., 5-6 February 2013. In Proceedings of SPIE, 2013, v. 8661, art. no. 86610S How to Cite?
AbstractA high throughput is often required in many machine vision systems, especially on the assembly line in the semiconductor industry. To develop a non-contact three-dimensional dense surface reconstruction system for real-time surface inspection and metrology applications, in this work, we project sinusoidal patterns onto the inspected objects and propose a high speed phase-shift algorithm. First, we use an illumination-reflectivity-focus (IRF) model to investigate the factors in image formation for phase-measuring profilometry. Second, by visualizing and analyzing the characteristic intensity locus projected onto the intensity space, we build a two-dimensional phase map to store the phase information for each point in the intensity space. Third, we develop an efficient elliptic phase-shift algorithm (E-PSA) for high speed surface profilometry. In this method, instead of calculating the time-consuming inverse trigonometric function, we only need to normalize the measured image intensities and then index the built two-dimensional phase map during real-time phase reconstruction. Finally, experimental results show that it is about two times faster than conventional phase-shift algorithm. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
DescriptionInteractive Paper Session
Persistent Identifierhttp://hdl.handle.net/10722/186791
ISBN
ISSN
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorDeng, Fen_US
dc.contributor.authorLi, Zen_US
dc.contributor.authorChen, J-
dc.contributor.authorDeng, J-
dc.contributor.authorFung, KSM-
dc.contributor.authorLam, EY-
dc.date.accessioned2013-08-20T12:19:31Z-
dc.date.available2013-08-20T12:19:31Z-
dc.date.issued2013en_US
dc.identifier.citationConference 8661 - Image Processing: Machine Vision Applications VI, Burlingame, CA., 5-6 February 2013. In Proceedings of SPIE, 2013, v. 8661, art. no. 86610Sen_US
dc.identifier.isbn978-081949434-4-
dc.identifier.issn0277-786X-
dc.identifier.urihttp://hdl.handle.net/10722/186791-
dc.descriptionInteractive Paper Session-
dc.description.abstractA high throughput is often required in many machine vision systems, especially on the assembly line in the semiconductor industry. To develop a non-contact three-dimensional dense surface reconstruction system for real-time surface inspection and metrology applications, in this work, we project sinusoidal patterns onto the inspected objects and propose a high speed phase-shift algorithm. First, we use an illumination-reflectivity-focus (IRF) model to investigate the factors in image formation for phase-measuring profilometry. Second, by visualizing and analyzing the characteristic intensity locus projected onto the intensity space, we build a two-dimensional phase map to store the phase information for each point in the intensity space. Third, we develop an efficient elliptic phase-shift algorithm (E-PSA) for high speed surface profilometry. In this method, instead of calculating the time-consuming inverse trigonometric function, we only need to normalize the measured image intensities and then index the built two-dimensional phase map during real-time phase reconstruction. Finally, experimental results show that it is about two times faster than conventional phase-shift algorithm. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.-
dc.languageengen_US
dc.publisherSociety of Photo-Optical Instrumentation Engineers (SPIE). The Journal's web site is located at http://www.spie.org/app/Publications/index.cfm?fuseaction=proceedings-
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_US
dc.rightsProceedings of SPIE - The International Society for Optical Engineering. Copyright © Society of Photo-Optical Instrumentation Engineers (SPIE).-
dc.titleAn elliptic phase-shifting algorithm for high speed three-dimensional profilometryen_US
dc.typeConference_Paperen_US
dc.identifier.emailLam, EY: elam@eee.hku.hken_US
dc.identifier.authorityLam, EY=rp00131en_US
dc.description.naturelink_to_OA_fulltext-
dc.identifier.doi10.1117/12.2001417-
dc.identifier.hkuros220497en_US
dc.identifier.volume8661-
dc.identifier.isiWOS:000321820300026-
dc.publisher.placeUnited States-
dc.customcontrol.immutablesml 130904-

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