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Conference Paper: Spreading-resistance temperature sensor on thin-film SOI
Title | Spreading-resistance temperature sensor on thin-film SOI |
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Authors | |
Issue Date | 2001 |
Citation | Proceedings Of The Ieee Hong Kong Electron Devices Meeting, 2001, p. 75-78 How to Cite? |
Abstract | Spreading-resistance temperature (SRT) sensor on thin-film SOI is investigated with emphasis on its resistance versus temperature (R-T) characteristics. The effect of Si-film thickness on the maximum operating temperature (Tmax) is simulated and verified by experimental results. Thin-film SOI SRT sensor not only achieves promising device characteristics, but also shows that its bias current can be as low as 1 μA, which is 1,000 times lower than that of bulk Si SRT sensor. Therefore, SRT sensor on thin-film SOI can cover a wide scope of low-power applications. |
Persistent Identifier | http://hdl.handle.net/10722/158311 |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Li, B | en_US |
dc.contributor.author | Lai, PT | en_US |
dc.contributor.author | Sin, JKO | en_US |
dc.date.accessioned | 2012-08-08T08:59:01Z | - |
dc.date.available | 2012-08-08T08:59:01Z | - |
dc.date.issued | 2001 | en_US |
dc.identifier.citation | Proceedings Of The Ieee Hong Kong Electron Devices Meeting, 2001, p. 75-78 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/158311 | - |
dc.description.abstract | Spreading-resistance temperature (SRT) sensor on thin-film SOI is investigated with emphasis on its resistance versus temperature (R-T) characteristics. The effect of Si-film thickness on the maximum operating temperature (Tmax) is simulated and verified by experimental results. Thin-film SOI SRT sensor not only achieves promising device characteristics, but also shows that its bias current can be as low as 1 μA, which is 1,000 times lower than that of bulk Si SRT sensor. Therefore, SRT sensor on thin-film SOI can cover a wide scope of low-power applications. | en_US |
dc.language | eng | en_US |
dc.relation.ispartof | Proceedings of the IEEE Hong Kong Electron Devices Meeting | en_US |
dc.title | Spreading-resistance temperature sensor on thin-film SOI | en_US |
dc.type | Conference_Paper | en_US |
dc.identifier.email | Lai, PT:laip@eee.hku.hk | en_US |
dc.identifier.authority | Lai, PT=rp00130 | en_US |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.scopus | eid_2-s2.0-0034829283 | en_US |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-0034829283&selection=ref&src=s&origin=recordpage | en_US |
dc.identifier.spage | 75 | en_US |
dc.identifier.epage | 78 | en_US |
dc.identifier.scopusauthorid | Li, B=26643217800 | en_US |
dc.identifier.scopusauthorid | Lai, PT=7202946460 | en_US |
dc.identifier.scopusauthorid | Sin, JKO=7103312667 | en_US |