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Article: Novel method of patterning YBaCuO superconducting thin films
Title | Novel method of patterning YBaCuO superconducting thin films |
---|---|
Authors | |
Issue Date | 1989 |
Publisher | American Institute of Physics. The Journal's web site is located at http://apl.aip.org/ |
Citation | Applied Physics Letters, 1989, v. 55 n. 9, p. 896-898 How to Cite? |
Abstract | A unique method of patterning YBaCuO thin films based on the inhibition of superconductivity by Si-YBaCuO intermixing has been developed. In the experiment, a thin Si film was first evaporated on a MgO substrate and subsequently patterned using laser direct-write etching. Multilayered YBaCuO thin films were then deposited by e-beam evaporation and annealed in a rapid thermal annealing system for 30-90 s at 980°C. The YBaCuO film deposited on the silicon regions became insulating. Auger depth profiling measurements indicate that Si-YBaCuO intermixing had occurred in these areas. Between the insulating regions, narrow YBaCuO superconducting lines were formed. For both 10-μm-wide, 1-mm-long and 2.5-μm-wide, 80-μm-long lines, the T c was observed above 76 K. The critical current density of the lines was measured to be 300 A/cm2 at 75 K. This patterning technique may be useful for fabrication of high Tc superconducting interconnects and devices. |
Persistent Identifier | http://hdl.handle.net/10722/155405 |
ISSN | 2023 Impact Factor: 3.5 2023 SCImago Journal Rankings: 0.976 |
ISI Accession Number ID |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ma, QY | en_US |
dc.contributor.author | Yang, ES | en_US |
dc.contributor.author | Treyz, GV | en_US |
dc.contributor.author | Chang, CA | en_US |
dc.date.accessioned | 2012-08-08T08:33:19Z | - |
dc.date.available | 2012-08-08T08:33:19Z | - |
dc.date.issued | 1989 | en_US |
dc.identifier.citation | Applied Physics Letters, 1989, v. 55 n. 9, p. 896-898 | - |
dc.identifier.issn | 0003-6951 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/155405 | - |
dc.description.abstract | A unique method of patterning YBaCuO thin films based on the inhibition of superconductivity by Si-YBaCuO intermixing has been developed. In the experiment, a thin Si film was first evaporated on a MgO substrate and subsequently patterned using laser direct-write etching. Multilayered YBaCuO thin films were then deposited by e-beam evaporation and annealed in a rapid thermal annealing system for 30-90 s at 980°C. The YBaCuO film deposited on the silicon regions became insulating. Auger depth profiling measurements indicate that Si-YBaCuO intermixing had occurred in these areas. Between the insulating regions, narrow YBaCuO superconducting lines were formed. For both 10-μm-wide, 1-mm-long and 2.5-μm-wide, 80-μm-long lines, the T c was observed above 76 K. The critical current density of the lines was measured to be 300 A/cm2 at 75 K. This patterning technique may be useful for fabrication of high Tc superconducting interconnects and devices. | en_US |
dc.language | eng | en_US |
dc.publisher | American Institute of Physics. The Journal's web site is located at http://apl.aip.org/ | en_US |
dc.relation.ispartof | Applied Physics Letters | en_US |
dc.title | Novel method of patterning YBaCuO superconducting thin films | en_US |
dc.type | Article | en_US |
dc.identifier.email | Yang, ES:esyang@hkueee.hku.hk | en_US |
dc.identifier.authority | Yang, ES=rp00199 | en_US |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1063/1.102448 | en_US |
dc.identifier.scopus | eid_2-s2.0-36549090789 | en_US |
dc.identifier.volume | 55 | en_US |
dc.identifier.issue | 9 | en_US |
dc.identifier.spage | 896 | en_US |
dc.identifier.epage | 898 | en_US |
dc.identifier.isi | WOS:A1989AM21500030 | - |
dc.publisher.place | United States | en_US |
dc.identifier.scopusauthorid | Ma, QY=7402815617 | en_US |
dc.identifier.scopusauthorid | Yang, ES=7202021229 | en_US |
dc.identifier.scopusauthorid | Treyz, GV=6701807595 | en_US |
dc.identifier.scopusauthorid | Chang, CA=7407042938 | en_US |
dc.identifier.issnl | 0003-6951 | - |