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Article: Properties of natural diamond microlenses fabricated by plasma etching

TitleProperties of natural diamond microlenses fabricated by plasma etching
Authors
Issue Date2005
Citation
Industrial Diamond Review, 2005, v. 65 n. 2, p. 29-32 How to Cite?
AbstractRefractive microlenses with diameters of between a few micrometers to a few hundred micrometers have received much attention, due to their numerous applications in, for example, optical communications, optical data storage, digital displays, and laser beam shaping. Wide band-gap inorganic materials, including GaN, SiC and ZnO have proved popular for these aplications in recent years due to their attractive optical and electronic properties. However, it is anticipated that these materiais will be superseded for many applications by diamond. Advantageous properties including optical transparency, high thermal conductivity and high carrier mobility make natural diamond an attractive choice, but its hardness and chemical inertness provide a significant challenge for device processing. This paper demonstrates the ability to etch natural grade-lla diamond using inductively-coupled plasma etching and discusses the properties of the finished lenses in terms of surface roughness, surface profile and focal length.
Persistent Identifierhttp://hdl.handle.net/10722/155272
ISSN
2007 Impact Factor: 0.138
2011 SCImago Journal Rankings: 0.143
References

 

DC FieldValueLanguage
dc.contributor.authorChoi, HWen_US
dc.contributor.authorGu, Een_US
dc.contributor.authorLiu, Cen_US
dc.contributor.authorGriffin, Cen_US
dc.contributor.authorGirkin, JMen_US
dc.contributor.authorWatson, IMen_US
dc.contributor.authorDawson, MDen_US
dc.date.accessioned2012-08-08T08:32:38Z-
dc.date.available2012-08-08T08:32:38Z-
dc.date.issued2005en_US
dc.identifier.citationIndustrial Diamond Review, 2005, v. 65 n. 2, p. 29-32en_US
dc.identifier.issn0019-8145en_US
dc.identifier.urihttp://hdl.handle.net/10722/155272-
dc.description.abstractRefractive microlenses with diameters of between a few micrometers to a few hundred micrometers have received much attention, due to their numerous applications in, for example, optical communications, optical data storage, digital displays, and laser beam shaping. Wide band-gap inorganic materials, including GaN, SiC and ZnO have proved popular for these aplications in recent years due to their attractive optical and electronic properties. However, it is anticipated that these materiais will be superseded for many applications by diamond. Advantageous properties including optical transparency, high thermal conductivity and high carrier mobility make natural diamond an attractive choice, but its hardness and chemical inertness provide a significant challenge for device processing. This paper demonstrates the ability to etch natural grade-lla diamond using inductively-coupled plasma etching and discusses the properties of the finished lenses in terms of surface roughness, surface profile and focal length.en_US
dc.languageengen_US
dc.relation.ispartofIndustrial Diamond Reviewen_US
dc.titleProperties of natural diamond microlenses fabricated by plasma etchingen_US
dc.typeArticleen_US
dc.identifier.emailChoi, HW:hwchoi@eee.hku.hken_US
dc.identifier.authorityChoi, HW=rp00108en_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-19944380159en_US
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-19944380159&selection=ref&src=s&origin=recordpageen_US
dc.identifier.volume65en_US
dc.identifier.issue2en_US
dc.identifier.spage29en_US
dc.identifier.epage32en_US
dc.identifier.scopusauthoridChoi, HW=7404334877en_US
dc.identifier.scopusauthoridGu, E=7004420026en_US
dc.identifier.scopusauthoridLiu, C=36064477300en_US
dc.identifier.scopusauthoridGriffin, C=8732304400en_US
dc.identifier.scopusauthoridGirkin, JM=6701651108en_US
dc.identifier.scopusauthoridWatson, IM=24482692400en_US
dc.identifier.scopusauthoridDawson, MD=7203061779en_US

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