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Conference Paper: In situ processing for gaas devices using ultraviolet laser formed oxides.

TitleIn situ processing for gaas devices using ultraviolet laser formed oxides.
Authors
Issue Date1988
Citation
Conference on Lasers and Electro-Optics, Anaheim, CA, USA, 1988 How to Cite?
AbstractThe GaAs surface has been modified to reduce the density of interface states when a Schottky barrier contact is formed, producing a barrier that correlates more strongly with the metal work function. The GaAs (100) surface was modified photochemically by the reaction of oxygen under deep ultraviolet-laser illumination prior to metal deposition. The electrical characteristics of the resulting contacts have been investigated. The results confirm the effectiveness of the results.
Persistent Identifierhttp://hdl.handle.net/10722/155268

 

DC FieldValueLanguage
dc.contributor.authorSchmidt, MTen_US
dc.contributor.authorPodlesnik, DVen_US
dc.contributor.authorYu, CFen_US
dc.contributor.authorYang, ESen_US
dc.contributor.authorOsgood Jr, RMen_US
dc.date.accessioned2012-08-08T08:32:37Z-
dc.date.available2012-08-08T08:32:37Z-
dc.date.issued1988en_US
dc.identifier.citationConference on Lasers and Electro-Optics, Anaheim, CA, USA, 1988-
dc.identifier.urihttp://hdl.handle.net/10722/155268-
dc.description.abstractThe GaAs surface has been modified to reduce the density of interface states when a Schottky barrier contact is formed, producing a barrier that correlates more strongly with the metal work function. The GaAs (100) surface was modified photochemically by the reaction of oxygen under deep ultraviolet-laser illumination prior to metal deposition. The electrical characteristics of the resulting contacts have been investigated. The results confirm the effectiveness of the results.en_US
dc.languageengen_US
dc.titleIn situ processing for gaas devices using ultraviolet laser formed oxides.en_US
dc.typeConference_Paperen_US
dc.identifier.emailYang, ES:esyang@hkueee.hku.hken_US
dc.identifier.authorityYang, ES=rp00199en_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-18844479191en_US
dc.identifier.scopusauthoridSchmidt, MT=23016700400en_US
dc.identifier.scopusauthoridPodlesnik, DV=6603771158en_US
dc.identifier.scopusauthoridYu, CF=22973795500en_US
dc.identifier.scopusauthoridYang, ES=7202021229en_US
dc.identifier.scopusauthoridOsgood Jr, RM=35596793600en_US

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