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Article: A new multi-function thin-film microsensor based on Ba1-xLaxTiO3

TitleA new multi-function thin-film microsensor based on Ba1-xLaxTiO3
Authors
Issue Date2000
PublisherInstitute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/sms
Citation
Smart Materials And Structures, 2000, v. 9 n. 4, p. 498-501 How to Cite?
AbstractA new multi-function microsensor with a barium lanthanum titanate (Ba1-xLaxTiO3) thin film is developed for the fabrication of a thin-film resistor and a metal-insulator-semiconductor (MIS) capacitor on a SiO2/Si substrate. The results reveal that the thin-film resistor has good sensitivity to visible light and good thermal sensitivity within the temperature range of 28-400°C. The MIS capacitor is sensitive to changes in the relative humidity (RH), with a 130% change of the current for a humidity change from 12 to 92% RH at a test frequency of 500 Hz, and with short response times of 5 and 4.5 s for the adsorption and desorption of water vapor, respectively. The effects of the test frequency on the photo, thermal and humidity sensitivity performances are also investigated. Since the lifetime of charge carriers of Ba1-xLaxTiO3 thin films is only 16 ms, about half that of Sr1-xLaxTiO3 thin films, the device can detect light modulation at higher frequencies.
Persistent Identifierhttp://hdl.handle.net/10722/155131
ISSN
2015 Impact Factor: 2.769
2015 SCImago Journal Rankings: 1.171
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorLi, Ben_US
dc.contributor.authorLai, PTen_US
dc.contributor.authorLi, GQen_US
dc.contributor.authorZeng, SHen_US
dc.contributor.authorHuang, MQen_US
dc.date.accessioned2012-08-08T08:32:00Z-
dc.date.available2012-08-08T08:32:00Z-
dc.date.issued2000en_US
dc.identifier.citationSmart Materials And Structures, 2000, v. 9 n. 4, p. 498-501en_US
dc.identifier.issn0964-1726en_US
dc.identifier.urihttp://hdl.handle.net/10722/155131-
dc.description.abstractA new multi-function microsensor with a barium lanthanum titanate (Ba1-xLaxTiO3) thin film is developed for the fabrication of a thin-film resistor and a metal-insulator-semiconductor (MIS) capacitor on a SiO2/Si substrate. The results reveal that the thin-film resistor has good sensitivity to visible light and good thermal sensitivity within the temperature range of 28-400°C. The MIS capacitor is sensitive to changes in the relative humidity (RH), with a 130% change of the current for a humidity change from 12 to 92% RH at a test frequency of 500 Hz, and with short response times of 5 and 4.5 s for the adsorption and desorption of water vapor, respectively. The effects of the test frequency on the photo, thermal and humidity sensitivity performances are also investigated. Since the lifetime of charge carriers of Ba1-xLaxTiO3 thin films is only 16 ms, about half that of Sr1-xLaxTiO3 thin films, the device can detect light modulation at higher frequencies.en_US
dc.languageengen_US
dc.publisherInstitute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/smsen_US
dc.relation.ispartofSmart Materials and Structuresen_US
dc.titleA new multi-function thin-film microsensor based on Ba1-xLaxTiO3en_US
dc.typeArticleen_US
dc.identifier.emailLai, PT:laip@eee.hku.hken_US
dc.identifier.authorityLai, PT=rp00130en_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1088/0964-1726/9/4/313en_US
dc.identifier.scopuseid_2-s2.0-0034248702en_US
dc.identifier.hkuros61917-
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0034248702&selection=ref&src=s&origin=recordpageen_US
dc.identifier.volume9en_US
dc.identifier.issue4en_US
dc.identifier.spage498en_US
dc.identifier.epage501en_US
dc.identifier.isiWOS:000089097700013-
dc.publisher.placeUnited Kingdomen_US
dc.identifier.scopusauthoridLi, B=26643217800en_US
dc.identifier.scopusauthoridLai, PT=7202946460en_US
dc.identifier.scopusauthoridLi, GQ=7407050307en_US
dc.identifier.scopusauthoridZeng, SH=7202412592en_US
dc.identifier.scopusauthoridHuang, MQ=7404259759en_US
dc.customcontrol.immutablejt 1303020-

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