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Article: The effects of duty cycle and voltage swing of gate pulse on the AC-stress-induced degradation of nMOSFETs with N2O gate oxides
Title | The effects of duty cycle and voltage swing of gate pulse on the AC-stress-induced degradation of nMOSFETs with N2O gate oxides |
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Authors | |
Issue Date | 1998 |
Publisher | Pergamon. The Journal's web site is located at http://www.elsevier.com/locate/microrel |
Citation | Microelectronics Reliability, 1998, v. 38 n. 12, p. 1925-1929 How to Cite? |
Abstract | AC-stress-induced degradation in metal-oxide-semiconductor field-effect transistor (MOSFET) with N2O-grown and N2O-nitrided gate oxides was investigated, with emphasis on the duty cycle and voltage swing of the gate pulse. It is demonstrated that N2O-oxide devices show a weaker duty-cycle dependence than thermal-oxide devices, with N2O-nitrided oxide superior to N2O-grown oxide. More significantly, opposite frequency dependence of the VT shift is found between gate-pulse swings of 0-1/2 VD and 0-VD. The reasons are likely due to charge trapping and neutral-trap creation in the gate oxide. © 1998 Elsevier Science Ltd. All rights reserved. |
Persistent Identifier | http://hdl.handle.net/10722/155089 |
ISSN | 2023 Impact Factor: 1.6 2023 SCImago Journal Rankings: 0.394 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
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dc.contributor.author | Zeng, X | en_HK |
dc.contributor.author | Lai, PT | en_HK |
dc.contributor.author | Xu, JP | en_HK |
dc.date.accessioned | 2012-08-08T08:31:49Z | - |
dc.date.available | 2012-08-08T08:31:49Z | - |
dc.date.issued | 1998 | en_HK |
dc.identifier.citation | Microelectronics Reliability, 1998, v. 38 n. 12, p. 1925-1929 | en_HK |
dc.identifier.issn | 0026-2714 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/155089 | - |
dc.description.abstract | AC-stress-induced degradation in metal-oxide-semiconductor field-effect transistor (MOSFET) with N2O-grown and N2O-nitrided gate oxides was investigated, with emphasis on the duty cycle and voltage swing of the gate pulse. It is demonstrated that N2O-oxide devices show a weaker duty-cycle dependence than thermal-oxide devices, with N2O-nitrided oxide superior to N2O-grown oxide. More significantly, opposite frequency dependence of the VT shift is found between gate-pulse swings of 0-1/2 VD and 0-VD. The reasons are likely due to charge trapping and neutral-trap creation in the gate oxide. © 1998 Elsevier Science Ltd. All rights reserved. | en_HK |
dc.language | eng | en_US |
dc.publisher | Pergamon. The Journal's web site is located at http://www.elsevier.com/locate/microrel | en_HK |
dc.relation.ispartof | Microelectronics Reliability | en_HK |
dc.title | The effects of duty cycle and voltage swing of gate pulse on the AC-stress-induced degradation of nMOSFETs with N2O gate oxides | en_HK |
dc.type | Article | en_HK |
dc.identifier.email | Lai, PT: laip@eee.hku.hk | en_HK |
dc.identifier.email | Xu, JP: jpxu@eee.hku.hk | en_HK |
dc.identifier.authority | Lai, PT=rp00130 | en_HK |
dc.identifier.authority | Xu, JP=rp00197 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1016/S0026-2714(98)00063-8 | - |
dc.identifier.scopus | eid_2-s2.0-0032308504 | en_HK |
dc.identifier.hkuros | 44781 | - |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-0032308504&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 38 | en_HK |
dc.identifier.issue | 12 | en_HK |
dc.identifier.spage | 1925 | en_HK |
dc.identifier.epage | 1929 | en_HK |
dc.identifier.isi | WOS:000077873600016 | - |
dc.publisher.place | United Kingdom | en_HK |
dc.identifier.scopusauthorid | Zeng, X=7403248314 | en_HK |
dc.identifier.scopusauthorid | Lai, PT=7202946460 | en_HK |
dc.identifier.scopusauthorid | Xu, JP=7407004696 | en_HK |
dc.identifier.issnl | 0026-2714 | - |