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Article: A two-dimensional flow sensor using integrated silicon spreading-resistance temperature detectors

TitleA two-dimensional flow sensor using integrated silicon spreading-resistance temperature detectors
Authors
Issue Date1997
PublisherAmerican Institute of Physics. The Journal's web site is located at http://ojps.aip.org/rsio/
Citation
Review Of Scientific Instruments, 1997, v. 68 n. 10, p. 3785-3789 How to Cite?
AbstractA simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and speed is described. By integrating two couples of silicon spreading-resistance temperature (SRT) sensors in two perpendicular directions on the surface of a silicon chip, this sensor can detect flow speed and flow direction φ in a full range of 360°. Experimental results confirm theoretical analysis that the output of the sensor increases with the square root of the flow velocity, and the outputs in the two perpendicular directions are proportional to sin φ and cos φ, respectively. The effects of sensor layout are also discussed. With complete oxide isolation for the SRT sensors, the flow sensor could achieve higher sensitivity by operating above the intrinsic temperature of silicon (∼150°C), or could be used to detect fluid flow at a temperature as high as 300°C. © 1997 American Institute of Physics.
Persistent Identifierhttp://hdl.handle.net/10722/155057
ISSN
2015 Impact Factor: 1.336
2015 SCImago Journal Rankings: 0.571
References

 

DC FieldValueLanguage
dc.contributor.authorLiu, Ben_US
dc.contributor.authorLai, PTen_US
dc.contributor.authorZheng, Xen_US
dc.contributor.authorWu, Zen_US
dc.contributor.authorLi, Ben_US
dc.date.accessioned2012-08-08T08:31:41Z-
dc.date.available2012-08-08T08:31:41Z-
dc.date.issued1997en_US
dc.identifier.citationReview Of Scientific Instruments, 1997, v. 68 n. 10, p. 3785-3789en_US
dc.identifier.issn0034-6748en_US
dc.identifier.urihttp://hdl.handle.net/10722/155057-
dc.description.abstractA simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and speed is described. By integrating two couples of silicon spreading-resistance temperature (SRT) sensors in two perpendicular directions on the surface of a silicon chip, this sensor can detect flow speed and flow direction φ in a full range of 360°. Experimental results confirm theoretical analysis that the output of the sensor increases with the square root of the flow velocity, and the outputs in the two perpendicular directions are proportional to sin φ and cos φ, respectively. The effects of sensor layout are also discussed. With complete oxide isolation for the SRT sensors, the flow sensor could achieve higher sensitivity by operating above the intrinsic temperature of silicon (∼150°C), or could be used to detect fluid flow at a temperature as high as 300°C. © 1997 American Institute of Physics.en_US
dc.languageengen_US
dc.publisherAmerican Institute of Physics. The Journal's web site is located at http://ojps.aip.org/rsio/en_US
dc.relation.ispartofReview of Scientific Instrumentsen_US
dc.titleA two-dimensional flow sensor using integrated silicon spreading-resistance temperature detectorsen_US
dc.typeArticleen_US
dc.identifier.emailLai, PT:laip@eee.hku.hken_US
dc.identifier.authorityLai, PT=rp00130en_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0031256104en_US
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0031256104&selection=ref&src=s&origin=recordpageen_US
dc.identifier.volume68en_US
dc.identifier.issue10en_US
dc.identifier.spage3785en_US
dc.identifier.epage3789en_US
dc.publisher.placeUnited Statesen_US
dc.identifier.scopusauthoridLiu, B=7408690364en_US
dc.identifier.scopusauthoridLai, PT=7202946460en_US
dc.identifier.scopusauthoridZheng, X=7404091424en_US
dc.identifier.scopusauthoridWu, Z=7501411463en_US
dc.identifier.scopusauthoridLi, B=26643217800en_US

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