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Conference Paper: Dielectric fluid immersed MEMS tunable capacitors

TitleDielectric fluid immersed MEMS tunable capacitors
Authors
Issue Date2003
PublisherI E E E. The Journal's web site is located at http://www.ims2006.org
Citation
Ieee Mtt-S International Microwave Symposium Digest, 2003, v. 1, p. 495-498 How to Cite?
AbstractEnhancement of MEMS tunable capacitors using dielectric fluids is reported. Micromachlned tunable capacitors were tested and characterized In air and In mineral oil with a relative permittivity (εr) of 2.29. In oil the capacitors exhibit a factor of 2.2 to 2.29 Increase in the initial capacitance as well as the achievable tuning range. The theoretical electrical and mechanical performance enhancements have been verified for capacitors with self-resonant frequencies of 18.3GHz in air. The high frequency testing device exhibited a capacitance of 344fF at 5GHz with a Q-factor of 72 in air, and a capacitance of 799fF with a Q-factor of 40 in oil. In addition, the devices immersed in oil have increased, tunable damping and a significantly higher breakdown voltage.
Persistent Identifierhttp://hdl.handle.net/10722/149002
ISSN
References

 

DC FieldValueLanguage
dc.contributor.authorMcCormick, DTen_HK
dc.contributor.authorLi, Zen_HK
dc.contributor.authorTien, Nen_HK
dc.date.accessioned2012-06-20T06:17:47Z-
dc.date.available2012-06-20T06:17:47Z-
dc.date.issued2003en_HK
dc.identifier.citationIeee Mtt-S International Microwave Symposium Digest, 2003, v. 1, p. 495-498en_US
dc.identifier.issn0149-645Xen_HK
dc.identifier.urihttp://hdl.handle.net/10722/149002-
dc.description.abstractEnhancement of MEMS tunable capacitors using dielectric fluids is reported. Micromachlned tunable capacitors were tested and characterized In air and In mineral oil with a relative permittivity (εr) of 2.29. In oil the capacitors exhibit a factor of 2.2 to 2.29 Increase in the initial capacitance as well as the achievable tuning range. The theoretical electrical and mechanical performance enhancements have been verified for capacitors with self-resonant frequencies of 18.3GHz in air. The high frequency testing device exhibited a capacitance of 344fF at 5GHz with a Q-factor of 72 in air, and a capacitance of 799fF with a Q-factor of 40 in oil. In addition, the devices immersed in oil have increased, tunable damping and a significantly higher breakdown voltage.en_HK
dc.languageengen_US
dc.publisherI E E E. The Journal's web site is located at http://www.ims2006.orgen_HK
dc.relation.ispartofIEEE MTT-S International Microwave Symposium Digesten_HK
dc.titleDielectric fluid immersed MEMS tunable capacitorsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, N: nctien@hku.hken_HK
dc.identifier.authorityTien, N=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0041663538en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0041663538&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume1en_HK
dc.identifier.spage495en_HK
dc.identifier.epage498en_HK
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridMcCormick, DT=7202521902en_HK
dc.identifier.scopusauthoridLi, Z=24306828000en_HK
dc.identifier.scopusauthoridTien, N=7006532826en_HK

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