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Article: Design, fabrication, and testing of a microfabricated Corona Ionizer

TitleDesign, fabrication, and testing of a microfabricated Corona Ionizer
Authors
KeywordsAvalanche
Corona
Discharge
Electroplating
Inception
Ionizer
Microfabricated
Plasma
Streamer
Issue Date2008
Citation
Journal Of Microelectromechanical Systems, 2008, v. 17 n. 1, p. 115-123 How to Cite?
AbstractA microfabricated corona ionizer is developed for miniaturized air particle monitoring instruments. Peek's breakdown criterion and Warburg's Law are used to calculate the required electrode geometries. Single mask electroplating is employed as the microfabrication technique. Devices with discharge pin radius of 20 μm and interelectrode spacing of 1.4, 1.8, 2.0, and 2.2 mm are fabricated and tested. The inception voltages in the range from 1.4 to 2 kV are achieved without substrate breakdown. It consumes relatively low power at 150 mW or less. Corona charging currents of more than 50 μA were achieved before streamers break down. The experimental results also demonstrated the nondependency of the inception voltage on the pin's radius of curvature so long as it is significantly smaller than the interelectrode spacing. There is only one value of inception voltage for each given interelectrode spacing (1.4 to 2.2 mm) with the pin's radius of curvature ranging from 10 to 200 μm. This implies that strict dimensional control is not required in the microfabrication process in order to ensure the same inception voltage for each device. © 2008 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/148955
ISSN
2015 Impact Factor: 1.939
2015 SCImago Journal Rankings: 0.847
ISI Accession Number ID
References

 

DC FieldValueLanguage
dc.contributor.authorChua, Ben_HK
dc.contributor.authorWexler, ASen_HK
dc.contributor.authorTien, NCen_HK
dc.contributor.authorNiemeier, DAen_HK
dc.contributor.authorHolmen, BAen_HK
dc.date.accessioned2012-06-20T06:17:03Z-
dc.date.available2012-06-20T06:17:03Z-
dc.date.issued2008en_HK
dc.identifier.citationJournal Of Microelectromechanical Systems, 2008, v. 17 n. 1, p. 115-123en_HK
dc.identifier.issn1057-7157en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148955-
dc.description.abstractA microfabricated corona ionizer is developed for miniaturized air particle monitoring instruments. Peek's breakdown criterion and Warburg's Law are used to calculate the required electrode geometries. Single mask electroplating is employed as the microfabrication technique. Devices with discharge pin radius of 20 μm and interelectrode spacing of 1.4, 1.8, 2.0, and 2.2 mm are fabricated and tested. The inception voltages in the range from 1.4 to 2 kV are achieved without substrate breakdown. It consumes relatively low power at 150 mW or less. Corona charging currents of more than 50 μA were achieved before streamers break down. The experimental results also demonstrated the nondependency of the inception voltage on the pin's radius of curvature so long as it is significantly smaller than the interelectrode spacing. There is only one value of inception voltage for each given interelectrode spacing (1.4 to 2.2 mm) with the pin's radius of curvature ranging from 10 to 200 μm. This implies that strict dimensional control is not required in the microfabrication process in order to ensure the same inception voltage for each device. © 2008 IEEE.en_HK
dc.languageengen_US
dc.relation.ispartofJournal of Microelectromechanical Systemsen_HK
dc.subjectAvalancheen_HK
dc.subjectCoronaen_HK
dc.subjectDischargeen_HK
dc.subjectElectroplatingen_HK
dc.subjectInceptionen_HK
dc.subjectIonizeren_HK
dc.subjectMicrofabricateden_HK
dc.subjectPlasmaen_HK
dc.subjectStreameren_HK
dc.titleDesign, fabrication, and testing of a microfabricated Corona Ionizeren_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1109/JMEMS.2007.909515en_HK
dc.identifier.scopuseid_2-s2.0-40449096694en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-40449096694&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume17en_HK
dc.identifier.issue1en_HK
dc.identifier.spage115en_HK
dc.identifier.epage123en_HK
dc.identifier.isiWOS:000253259600013-
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridChua, B=36973839300en_HK
dc.identifier.scopusauthoridWexler, AS=7005728145en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridNiemeier, DA=35578120000en_HK
dc.identifier.scopusauthoridHolmen, BA=6603865625en_HK

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