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Article: Electrothermally actuated bi-directional linear vibromotor

TitleElectrothermally actuated bi-directional linear vibromotor
Authors
Pai, MTien, NC
Issue Date1999
Citation
Microscale Thermophysical Engineering, 1999, v. 3 n. 2, p. 141-150 How to Cite?
AbstractA compact polysilicon surface-micromachined thermal actuator-based vibromotor has been designed and fabricated. Mechanical power transmission occurs during the impact of the thermal actuators on the sides of a movable guided element (slider.) Bi-directional operation is made possible through the impact head design. The thermal actuators have been driven at frequencies up to 10 kHz. A traveling speed of 3 mm/s has been demonstrated with an AC input voltage of 2.0 Vat 5 kHz plus a 10.0-V DC bias offset. A polysilicon hinged vertical micromirror has been moved for a full range of 350 μm.
Persistent Identifierhttp://hdl.handle.net/10722/148935
ISSN
1089-3954
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorPai, Men_HK
dc.contributor.authorTien, NCen_HK
dc.date.accessioned2012-06-20T06:16:54Z-
dc.date.available2012-06-20T06:16:54Z-
dc.date.issued1999en_HK
dc.identifier.citationMicroscale Thermophysical Engineering, 1999, v. 3 n. 2, p. 141-150en_HK
dc.identifier.issn1089-3954en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148935-
dc.description.abstractA compact polysilicon surface-micromachined thermal actuator-based vibromotor has been designed and fabricated. Mechanical power transmission occurs during the impact of the thermal actuators on the sides of a movable guided element (slider.) Bi-directional operation is made possible through the impact head design. The thermal actuators have been driven at frequencies up to 10 kHz. A traveling speed of 3 mm/s has been demonstrated with an AC input voltage of 2.0 Vat 5 kHz plus a 10.0-V DC bias offset. A polysilicon hinged vertical micromirror has been moved for a full range of 350 μm.en_HK
dc.languageengen_US
dc.relation.ispartofMicroscale Thermophysical Engineeringen_HK
dc.titleElectrothermally actuated bi-directional linear vibromotoren_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0033438111en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0033438111&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume3en_HK
dc.identifier.issue2en_HK
dc.identifier.spage141en_HK
dc.identifier.epage150en_HK
dc.identifier.scopusauthoridPai, M=7102233717en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.issnl1089-3954-

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