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postgraduate thesis: Optimization schemes for process robustness enhancement in optical lithography
| Title | Optimization schemes for process robustness enhancement in optical lithography |
|---|---|
| Authors | |
| Advisors | Advisor(s):Lam, EYM |
| Issue Date | 2011 |
| Publisher | The University of Hong Kong (Pokfulam, Hong Kong) |
| Citation | Jia, N. [贾宁宁]. (2011). Optimization schemes for process robustness enhancement in optical lithography. (Thesis). University of Hong Kong, Pokfulam, Hong Kong SAR. Retrieved from http://dx.doi.org/10.5353/th_b4702859 |
| Degree | Doctor of Philosophy |
| Subject | Microlithography. Semiconductors - Etching. |
| Dept/Program | Electrical and Electronic Engineering |
| Persistent Identifier | http://hdl.handle.net/10722/144791 |
| HKU Library Item ID | b4702859 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Lam, EYM | - |
| dc.contributor.author | Jia, Ningning. | - |
| dc.contributor.author | 贾宁宁. | - |
| dc.date.issued | 2011 | - |
| dc.identifier.citation | Jia, N. [贾宁宁]. (2011). Optimization schemes for process robustness enhancement in optical lithography. (Thesis). University of Hong Kong, Pokfulam, Hong Kong SAR. Retrieved from http://dx.doi.org/10.5353/th_b4702859 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/144791 | - |
| dc.language | eng | - |
| dc.publisher | The University of Hong Kong (Pokfulam, Hong Kong) | - |
| dc.relation.ispartof | HKU Theses Online (HKUTO) | - |
| dc.rights | The author retains all proprietary rights, (such as patent rights) and the right to use in future works. | - |
| dc.rights | This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License. | - |
| dc.source.uri | http://hub.hku.hk/bib/B47028592 | - |
| dc.subject.lcsh | Microlithography. | - |
| dc.subject.lcsh | Semiconductors - Etching. | - |
| dc.title | Optimization schemes for process robustness enhancement in optical lithography | - |
| dc.type | PG_Thesis | - |
| dc.identifier.hkul | b4702859 | - |
| dc.description.thesisname | Doctor of Philosophy | - |
| dc.description.thesislevel | Doctoral | - |
| dc.description.thesisdiscipline | Electrical and Electronic Engineering | - |
| dc.description.nature | published_or_final_version | - |
| dc.identifier.doi | 10.5353/th_b4702859 | - |
| dc.date.hkucongregation | 2012 | - |
| dc.identifier.mmsid | 991032689919703414 | - |