Article: Influence of implantation dose on electroluminescence from Si-implanted silicon nitride thin films

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TitleInfluence of implantation dose on electroluminescence from Si-implanted silicon nitride thin films
AuthorsCen, ZH2
Chen, TP2
Ding, L3
Liu, Z2
Wong, JI2
Yang, M2
Goh, WP4
Fung, S1
KeywordsCurrent conduction
Electrically tunable
Excess si
Implantation dose
Ion dose
Issue Date2011
PublisherSpringer Verlag. The Journal's web site is located at http://link.springer.de/link/service/journals/00339/index.htm
CitationApplied Physics A: Materials Science And Processing, 2011, v. 104 n. 1, p. 239-245 [How to Cite?]
DOI: http://dx.doi.org/10.1007/s00339-010-6117-y
AbstractStrong visible electroluminescence (EL) with electrically tunable colors from violet to white has been observed from Si-implanted silicon nitride thin films. Influence of the implanted Si ion dose on both the current conduction and EL properties has been studied. With a larger excess Si concentration, the carrier transport is enhanced leading to a higher EL intensity, but the light emission efficiency is reduced. On the other hand, the increase of the excess Si concentration causes redshifts in the major EL bands and improves the transition of the EL colors with increasing current. The excess Si concentration is also found to have a significant influence on the EL degradation. These findings are important to the application of the Si-implanted thin films in light emitting devices. © 2010 Springer-Verlag.
ISSN0947-8396
2011 Impact Factor: 1.63
2011 SCImago Journal Rankings: 0.213
DOIhttp://dx.doi.org/10.1007/s00339-010-6117-y
ISI Accession Number IDWOS:000291652600035
Funding AgencyGrant Number
National Research Foundation of SingaporeNRF-G-CRP 2007-01
Funding Information:

This work has been financially supported by National Research Foundation of Singapore (NRF-G-CRP 2007-01).

ReferencesReferences in Scopus
DC Field
Value
dc.contributor.authorCen, ZH
dc.contributor.authorChen, TP
dc.contributor.authorDing, L
dc.contributor.authorLiu, Z
dc.contributor.authorWong, JI
dc.contributor.authorYang, M
dc.contributor.authorGoh, WP
dc.contributor.authorFung, S
dc.date.accessioned2011-09-23T05:52:52Z
dc.date.available2011-09-23T05:52:52Z
dc.date.issued2011
dc.description.abstractStrong visible electroluminescence (EL) with electrically tunable colors from violet to white has been observed from Si-implanted silicon nitride thin films. Influence of the implanted Si ion dose on both the current conduction and EL properties has been studied. With a larger excess Si concentration, the carrier transport is enhanced leading to a higher EL intensity, but the light emission efficiency is reduced. On the other hand, the increase of the excess Si concentration causes redshifts in the major EL bands and improves the transition of the EL colors with increasing current. The excess Si concentration is also found to have a significant influence on the EL degradation. These findings are important to the application of the Si-implanted thin films in light emitting devices. © 2010 Springer-Verlag.
dc.description.natureLink_to_subscribed_fulltext
dc.identifier.citationApplied Physics A: Materials Science And Processing, 2011, v. 104 n. 1, p. 239-245 [How to Cite?]
DOI: http://dx.doi.org/10.1007/s00339-010-6117-y
dc.identifier.citeulike8302751
dc.identifier.doihttp://dx.doi.org/10.1007/s00339-010-6117-y
dc.identifier.epage245
dc.identifier.hkuros195577
dc.identifier.isiWOS:000291652600035
Funding AgencyGrant Number
National Research Foundation of SingaporeNRF-G-CRP 2007-01
Funding Information:

This work has been financially supported by National Research Foundation of Singapore (NRF-G-CRP 2007-01).

dc.identifier.issn0947-8396
2011 Impact Factor: 1.63
2011 SCImago Journal Rankings: 0.213
dc.identifier.issue1
dc.identifier.scopuseid_2-s2.0-79959273960
dc.identifier.spage239
dc.identifier.urihttp://hdl.handle.net/10722/139644
dc.identifier.volume104
dc.languageeng
dc.publisherSpringer Verlag. The Journal's web site is located at http://link.springer.de/link/service/journals/00339/index.htm
dc.publisher.placeGermany
dc.relation.ispartofApplied Physics A: Materials Science and Processing
dc.relation.referencesReferences in Scopus
dc.rightsThe original publication is available at www.springerlink.com
dc.subjectCurrent conduction
dc.subjectElectrically tunable
dc.subjectExcess si
dc.subjectImplantation dose
dc.subjectIon dose
dc.titleInfluence of implantation dose on electroluminescence from Si-implanted silicon nitride thin films
dc.typeArticle
Author Affiliations
  1. The University of Hong Kong
  2. Nanyang Technological University
  3. null
  4. Institute of Materials Research and Engineering, A-Star, Singapore