Imaging limits in optical projection lithography


Grant Data
Project Title
Imaging limits in optical projection lithography
Principal Investigator
Dr Lam, Edmund Yin Mun   (Principal investigator)
Co-Investigator(s)
Dr Wong Alfred Kwok Kit   (Co-Investigator)
Duration
42
Start Date
2009-01-01
Completion Date
2012-06-30
Amount
491906
Conference Title
Presentation Title
Keywords
optical projection, lithography, Imaging
Discipline
Electronics,Signal and Image Processing
Panel
Engineering (E)
Sponsor
RGC General Research Fund (GRF)
HKU Project Code
HKU 713408E
Grant Type
General Research Fund (GRF)
Funding Year
2008/2009
Status
Completed