Imaging limits in optical projection lithography

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Grant Data
Project Title
Imaging limits in optical projection lithography
Principal Investigator
Professor Lam, Edmund Yin Mun   (Principal Investigator (PI))
Co-Investigator(s)
Dr Wong Alfred Kwok Kit   (Co-Investigator)
Duration
42
Start Date
2009-01-01
Amount
491906
Conference Title
Imaging limits in optical projection lithography
Presentation Title
Keywords
Imaging, lithography, optical projection
Discipline
Electronics,Signal and Image Processing
Panel
Engineering (E)
HKU Project Code
HKU 713408E
Grant Type
General Research Fund (GRF)
Funding Year
2008
Status
Completed