Improved semiconductor defect characterization using two-dimensional doppler broadening of annihilation radiation spectroscopy


Grant Data
Project Title
Improved semiconductor defect characterization using two-dimensional doppler broadening of annihilation radiation spectroscopy
Principal Investigator
Dr Beling, Christopher David   (Principal investigator)
Duration
24
Start Date
1998-10-01
Completion Date
2000-09-30
Amount
582000
Conference Title
Presentation Title
Sponsor
RGC General Research Fund (GRF)
HKU Project Code
HKU 7104/98P
Grant Type
General Research Fund (GRF)
Funding Year
1998/1999
Status
Completed