Improved semiconductor defect characterization using two-dimensional doppler broadening of annihilation radiation spectroscopy

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Grant Data
Project Title
Improved semiconductor defect characterization using two-dimensional doppler broadening of annihilation radiation spectroscopy
Principal Investigator
Professor Beling, Christopher David   (Principal Investigator)
Duration
24
Start Date
1998-10-01
Amount
582000
Conference Title
Improved semiconductor defect characterization using two-dimensional doppler broadening of annihilation radiation spectroscopy
Presentation Title
Keywords
null
Discipline
N/A
HKU Project Code
HKU 7104/98P
Grant Type
General Research Fund (GRF)
Funding Year
1998
Status
Completed